Inventor · disambiguated record
Markus Mengel
Also filed as: MENGEL MARKUS
16 granted patents·3 pending applications·118 citations·filing 2003–2022
92Inventor score
Top patents by PatentIndex Score
19 records- 0195US7760366B2System for measuring the image quality of an optical imaging systemZEISS CARL SMT AG·Filed 2008·Granted Jul 20, 2010·34 cites·17 claims
- 0293US7796274B2System for measuring the image quality of an optical imaging systemZEISS CARL SMT AG·Filed 2005·Granted Sep 14, 2010·21 cites·34 claims
- 0387US7286245B2Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyserZEISS CARL SMT AG·Filed 2003·Granted Oct 23, 2007·28 cites·21 claims
- 0479US7924436B2Method for approximating an influence of an optical system on the state of polarization of optical radiationZEISS CARL SMT GMBH·Filed 2007·Granted Apr 12, 2011·6 cites·29 claims
- 0577US7277182B2Apparatus for polarization-specific examination, optical imaging system, and calibration methodZEISS CARL SMT AG·Filed 2004·Granted Oct 2, 2007·15 cites·28 claims
- 0676US8488127B2System for measuring the image quality of an optical imaging systemMENGEL MARKUS·Filed 2010·Granted Jul 16, 2013·2 cites·38 claims
- 0772US9274440B2Arrangement for and method of characterising the polarization properties of an optical systemHEMPELMANN UWE·Filed 2012·Granted Mar 1, 2016·3 cites·23 claims
- 0871US7456933B2Method for improving the imaging properties of a projection objective for a microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2005·Granted Nov 25, 2008·3 cites·39 claims
- 0964US9034539B2Controllable transmission and phase compensation of transparent materialOSHEMKOV SERGEY·Filed 2011·Granted May 19, 2015·2 cites·26 claims
- 1062US11609506B2System and method for lateral shearing interferometry in an inspection toolKLA CORP·Filed 2022·Granted Mar 21, 2023·0 cites·21 claims
- 1161US9429495B2System for measuring the image quality of an optical imaging systemZEISS CARL SMT GMBH·Filed 2014·Granted Aug 30, 2016·0 cites·22 claims
- 1260US8823948B2System for measuring the image quality of an optical imaging systemZEISS CARL SMT GMBH·Filed 2013·Granted Sep 2, 2014·0 cites·20 claims
- 1353US9798249B2Method and apparatus for compensating at least one defect of an optical systemZEISS CARL SMS LTD·Filed 2014·Granted Oct 24, 2017·0 cites·20 claims
- 1452US7289223B2Method and apparatus for spatially resolved polarimetryZEISS CARL SMT AG·Filed 2004·Granted Oct 30, 2007·4 cites·15 claims
- 1552US2008037905A1Method and apparatus for determining the influencing of the state of polarization by an optical system, and an analyserZEISS CARL SMT AG·Filed 2007·Application pending·0 cites
- 1648US2008252888A1Apparatus for polarization-specific examination, optical imaging system, and calibration methodZEISS CARL SMT AG·Filed 2007·Application pending·0 cites
- 1745US8735030B2Method and apparatus for modifying a substrate surface of a photolithographic maskOSHEMKOV SERGEY·Filed 2011·Granted May 27, 2014·0 cites·12 claims
- 1843US8675178B2Microlithographic projection exposure apparatusMENGEL MARKUS·Filed 2008·Granted Mar 18, 2014·0 cites·20 claims
- 1937US2011063597A1Optical system for a microlithographic projection exposure apparatus and microlithographic exposure methodZEISS CARL SMT AG·Filed 2010·Application pending·0 cites
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