Inventor · disambiguated record
Berndt Warm
Also filed as: WARM BERNDT
16 granted patents·6 pending applications·167 citations·filing 1995–2019
91Inventor score
Top patents by PatentIndex Score
22 records- 0192US8587767B2Illumination optics for EUV microlithography and related system and apparatusFIOLKA DAMIAN·Filed 2010·Granted Nov 19, 2013·12 cites·22 claims
- 0291US5600434AApparatus for defending against an attacking missileDIEHL GMBH & CO·Filed 1995·Granted Feb 4, 1997·116 cites·10 claims
- 0382US9523922B2Illumination system of a microlithographic projection exposure apparatus having a temperature control deviceZEISS CARL SMT GMBH·Filed 2014·Granted Dec 20, 2016·3 cites·21 claims
- 0479US7858957B2Illumination optics for projection microlithographyZEISS CARL SMT AG·Filed 2007·Granted Dec 28, 2010·6 cites·25 claims
- 0574US8553200B2Optical element with at least one electrically conductive region, and illumination system with the optical elementWOLSCHRIJN BASTIAAN THEODOOR·Filed 2010·Granted Oct 8, 2013·3 cites·40 claims
- 0673US7354168B2Facet mirror having a number of mirror facetsZEISS CARL SMT AG·Filed 2004·Granted Apr 8, 2008·17 cites·6 claims
- 0769US8797507B2Illumination system of a microlithographic projection exposure apparatus having a temperature control deviceBACH FLORIAN·Filed 2011·Granted Aug 5, 2014·2 cites·14 claims
- 0861US2010007866A1Method for producing facet mirrors and projection exposure apparatusZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
- 0956US9393157B2Image processing method for determining focus depth of a refractive laserWARM BERNDT·Filed 2011·Granted Jul 19, 2016·1 cites·13 claims
- 1056US6724517B2Deformable mirrorDIEHL MUNITIONSSYSTEME GMBH·Filed 2002·Granted Apr 20, 2004·5 cites·10 claims
- 1155US8562133B2Simulator for use in ophthalmological measurementsSCHMID STEFAN·Filed 2010·Granted Oct 22, 2013·1 cites·13 claims
- 1252US8439902B2Apparatus and method for processing material with focused electromagnetic radiationWARM BERNDT·Filed 2010·Granted May 14, 2013·1 cites·15 claims
- 1351US7990520B2Microlithography illumination systems, components and methodsZEISS CARL SMT GMBH·Filed 2007·Granted Aug 2, 2011·0 cites·14 claims
- 1451US2013100426A1Method for producing facet mirrors and projection exposure apparatusZEISS CARL SMT GMBH·Filed 2012·Application pending·0 cites
- 1549US11256110B2System and method of utilizing computer-aided opticsALCON INC·Filed 2019·Granted Feb 22, 2022·0 cites·20 claims
- 1649US10959882B2Refractive treatment of an eye by printing material onto a targetNOVARTIS AG·Filed 2019·Granted Mar 30, 2021·0 cites·19 claims
- 1748US11116396B2Imaging multiple parts of the eyeNOVARTIS AG·Filed 2018·Granted Sep 14, 2021·0 cites·7 claims
- 1846US8643825B2Microlithography illumination systems, components and methodsWARM BERNDT·Filed 2011·Granted Feb 4, 2014·0 cites·19 claims
- 1941US2012274917A1Imaging opticsMANN HANS-JUERGEN·Filed 2012·Application pending·0 cites
- 2037US2013342811A1Apparatus for measuring optical properties of an objectWARM BERNDT·Filed 2011·Application pending·0 cites
- 2137US2004261646A1Proximity sensor, especially for ignition of the warhead of a shell directed against an aprroaching missileSTEUER RAIMAR·Filed 2003·Application pending·0 cites
- 2236US2011235015A1Illumination optics for euv microlithographyCarl Zeiss GmbH·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →