Inventor · disambiguated record

Palanikumaran Sakthievel

Also filed as: SAKTHIEVEL PALANIKUMARAN

2 granted patents·173 citations·filing 2001–2004

71Inventor score

Technology areasH10P

Files withAXCELIS TECH INC2

Top patents by PatentIndex Score

2 records

0194US7037846B2Method and apparatus for micro-jet enabled, low energy ion generation and transport in plasma processingAXCELIS TECH INC·Filed 2004·Granted May 2, 2006·98 cites·11 claims
0292US6761796B2Method and apparatus for micro-jet enabled, low-energy ion generation transport in plasma processingAXCELIS TECH INC·Filed 2001·Granted Jul 13, 2004·75 cites·11 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →