Inventor · disambiguated record
Toshiharu Nishimura
Also filed as: NISHIMURA TOSHIHARU
17 granted patents·1 pending application·1,298 citations·filing 1987–2008
94Inventor score
Top patents by PatentIndex Score
18 records- 0198US5503875AFilm forming method wherein a partial pressure of a reaction byproduct in a processing container is reduced temporarilyTOKYO ELECTRON LTD·Filed 1994·Granted Apr 2, 1996·733 cites·5 claims
- 0297US5637153AMethod of cleaning reaction tube and exhaustion piping system in heat processing apparatusTOKYO ELECTRON LTD·Filed 1995·Granted Jun 10, 1997·351 cites·16 claims
- 0385US5380370AMethod of cleaning reaction tubeTOKYO ELECTRON LTD·Filed 1993·Granted Jan 10, 1995·56 cites·8 claims
- 0484US4872033AImage forming apparatus capable of processing various kinds of photosensitive materialKONISHIROKU PHOTO IND·Filed 1989·Granted Oct 3, 1989·22 cites·12 claims
- 0580US8080109B2Film formation apparatus and method for using the sameOKADA MITSUHIRO·Filed 2008·Granted Dec 20, 2011·8 cites·15 claims
- 0672US5294262AMethod of cleaning a process tube with ClF3 gas and controlling the temperature of processTOKYO ELECTRON LTD·Filed 1993·Granted Mar 15, 1994·51 cites·19 claims
- 0759US5622566AFilm-forming apparatusTOKYO ELECTRON LTD·Filed 1994·Granted Apr 22, 1997·32 cites·10 claims
- 0856US4774547AApparatus for forming imagesKONISHIROKU PHOTO IND·Filed 1987·Granted Sep 27, 1988·7 cites·15 claims
- 0954US8183158B2Semiconductor processing apparatus and method for using sameTOMITA MASAHIKO·Filed 2007·Granted May 22, 2012·1 cites·14 claims
- 1050US2006081182A1Method of cleaning thin film deposition system, thin film deposition system and programTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 1148US5654230AMethod of forming doped filmTOKYO ELECTRON LTD·Filed 1995·Granted Aug 5, 1997·17 cites·8 claims
- 1246US7923357B2Method for forming poly-silicon filmTOKYO ELECTRON LTD·Filed 2008·Granted Apr 12, 2011·0 cites·11 claims
- 1345US7691445B2Film formation apparatus and method of using the sameTOKYO ELECTRON LTD·Filed 2006·Granted Apr 6, 2010·0 cites·17 claims
- 1444US7959737B2Film formation apparatus and method for using the sameTOKYO ELECTRON LTD·Filed 2007·Granted Jun 14, 2011·0 cites·15 claims
- 1542US5065441AImage processing apparatusKONISHIROKU PHOTO IND·Filed 1990·Granted Nov 12, 1991·8 cites·15 claims
- 1641US7470637B2Film formation apparatus and method of using the sameTOKYO ELECTRON LTD·Filed 2005·Granted Dec 30, 2008·0 cites·9 claims
- 1740US6110286AVertical processing unitTOKYO ELECTRON LTD·Filed 1998·Granted Aug 29, 2000·8 cites·18 claims
- 1834US5677235AMethod for forming silicon filmTOKYO ELECTRON LTD·Filed 1996·Granted Oct 14, 1997·4 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →