Inventor · disambiguated record
Steven Goza
Also filed as: GOZA STEVEN
2 granted patents·1 pending application·3 citations·filing 2016–2023
42Inventor score
Technology areasH10P
Files withLAM RES CORP3
Top patents by PatentIndex Score
3 records- 0178US11332824B2Systems and methods for reducing effluent build-up in a pumping exhaust systemLAM RES CORP·Filed 2016·Granted May 17, 2022·3 cites·11 claims
- 0263US12049698B2Systems and methods for reducing effluent build-up in a pumping exhaust systemLAM RES CORP·Filed 2022·Granted Jul 30, 2024·0 cites·12 claims
- 0354US2025285858A1Single wafer reactor, low temperature, thermal silicon nitride depositionLAM RES CORP·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →