Inventor · disambiguated record
Heui Jae Pahk
Also filed as: PAHK HEUI JAE
14 granted patents·2 pending applications·257 citations·filing 1997–2024
92Inventor score
Top patents by PatentIndex Score
16 records- 0187US8873067B2Interferometer for TSV measurement and measurement method using sameLEE KI HUN·Filed 2012·Granted Oct 28, 2014·25 cites·6 claims
- 0280US6167634B1Measurement and compensation system for thermal errors in machine toolsSNU PRECISION CO LTD·Filed 1999·Granted Jan 2, 2001·77 cites·7 claims
- 0375US6269544B1Apparatus for measuring three-dimensional volumetric errors in multiaxis machine toolSNU PRECISION CO LTD·Filed 2000·Granted Aug 7, 2001·21 cites·4 claims
- 0472US5841668AMethod of assessing three dimensional volumetric errors in multiaxis machine toolsSNU PRECISION CO LTD·Filed 1997·Granted Nov 24, 1998·63 cites·8 claims
- 0569US6860020B2Ultra-precision feeding apparatusFiled 2001·Granted Mar 1, 2005·10 cites·5 claims
- 0667US7113273B2Machine and method for inspecting ferrule of optical connectorPAHK HEUI-JAE·Filed 2003·Granted Sep 26, 2006·17 cites·12 claims
- 0762US6005669ANon contact measuring method for three dimensional micro pattern in measuring objectPAHK HEUI JAE·Filed 1998·Granted Dec 21, 1999·27 cites·5 claims
- 0860US2024369473A1Angle-resolved spectroscopic ellipsometer using spatial light modulator and thickness measuring method for thin filmSEOUL NAT UNIV R&DB FOUNDATION·Filed 2024·Application pending·0 cites
- 0957US8279447B2Method for measuring thicknessPAHK HEUI-JAE·Filed 2008·Granted Oct 2, 2012·3 cites·9 claims
- 1057US8199332B2Apparatus for measuring thicknessPAHK HEUI-JAE·Filed 2008·Granted Jun 12, 2012·3 cites·5 claims
- 1152US7308130B2Method for inspecting input shaft of power steering systemSNU PRECISION CO LTD·Filed 2002·Granted Dec 11, 2007·8 cites·3 claims
- 1251US12216044B2System for measuring thickness and physical properties of thin film using spatial light modulatorSEOUL NAT UNIV R&DB FOUNDATION·Filed 2021·Granted Feb 4, 2025·0 cites·14 claims
- 1347US7243571B2Ultra-precision positioning systemPAHK HEUI-JAE·Filed 2001·Granted Jul 17, 2007·2 cites·9 claims
- 1444US8947673B2Estimating thickness based on number of peaks between two peaks in scanning white light interferometryPAHK HEUI JAE·Filed 2009·Granted Feb 3, 2015·1 cites·7 claims
- 1542US2010006549A1Device for processing materials by laser beamSNU PRECISION CO LTD·Filed 2007·Application pending·0 cites
- 1638US9696144B2Three-dimensional shape measuring device capable of measuring color informationSNU PRECISION CO LTD·Filed 2014·Granted Jul 4, 2017·0 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →