Inventor · disambiguated record
Dong-Chul Heo
Also filed as: HEO DONG-CHUL
1 granted patent·6 pending applications·1 citations·filing 2005–2007
16Inventor score
Top patents by PatentIndex Score
7 records- 0166US7678751B2Composition for removing photoresist, method of removing photoresist and method of manufacturing a semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Mar 16, 2010·1 cites·39 claims
- 0237US2006096622A1Dry cleaning apparatus used to manufacture semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 2005·Application pending·0 cites
- 0335US2006130871A1Megasonic cleaner having double cleaning probe and cleaning methodSAMSUNG ELECTRONICS CO LTD·Filed 2005·Application pending·0 cites
- 0435US2007051393A1Apparatus for cleaning a waferSAMSUNG ELECTRONICS CO LTD·Filed 2006·Application pending·0 cites
- 0534US2006154484A1Method of removing a low-k layer and method of recycling a wafer using the sameHWANG DONG-WON·Filed 2006·Application pending·0 cites
- 0632US2007157957A1Substrate transfer robot and apparatus having the substrate transfer robot for cleaning a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2007·Application pending·0 cites
- 0727US2007175497A1Apparatus having heating portion in chemical bath for substrate wet treatment and method of heating chemical for substrate wet treatment using the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →