Inventor · disambiguated record
Paul Cornelis Hubertus Aben
Also filed as: ABEN PAUL CORNELIS HUBERTUS
6 granted patents·5 citations·filing 2013–2020
73Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV6
Top patents by PatentIndex Score
6 records- 0180US10859930B2Methods and apparatus for calculating substrate model parameters and controlling lithographic processingASML NETHERLANDS BV·Filed 2019·Granted Dec 8, 2020·1 cites·20 claims
- 0280US8887107B2Inspection method and apparatus and lithographic processing cellASML NETHERLANDS BV·Filed 2013·Granted Nov 11, 2014·2 cites·18 claims
- 0377US10191390B2Method for transferring a mark pattern to a substrate, a calibration method, and a lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Jan 29, 2019·2 cites·20 claims
- 0471US11300891B2Methods and apparatus for calculating substrate model parameters and controlling lithographic processingASML NETHERLANDS BV·Filed 2020·Granted Apr 12, 2022·0 cites·20 claims
- 0555USRE49460EInspection method and apparatus and lithographic processing cellASML NETHERLANDS BV·Filed 2015·Granted Mar 14, 2023·0 cites·27 claims
- 0654USRE49199EInspection method and apparatus and lithographic processing cellASML NETHERLANDS BV·Filed 2015·Granted Sep 6, 2022·0 cites·27 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →