Inventor · disambiguated record
Shu-Fen Wu
Also filed as: Wu shu-fen
4 granted patents·1 pending application·9 citations·filing 2012–2014
66Inventor score
Top patents by PatentIndex Score
5 records- 0190US9976215B2Semiconductor film formation apparatus and processCHOU YOU HUA·Filed 2012·Granted May 22, 2018·6 cites·17 claims
- 0264US9218998B2Electrostatic chuck with multi-zone controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Dec 22, 2015·1 cites·20 claims
- 0363US8902561B2Electrostatic chuck with multi-zone controlCHEN CHIA-HO·Filed 2012·Granted Dec 2, 2014·2 cites·20 claims
- 0431US9287154B2UV curing system for semiconductorsLIEN MING HUEI·Filed 2012·Granted Mar 15, 2016·0 cites·20 claims
- 0530US2013239889A1Valve purge assembly for semiconductor manufacturing toolsLIEN MING HUEI·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →