Inventor · disambiguated record
Ryuji Biro
Also filed as: BIRO RYUJI
12 granted patents·4 pending applications·297 citations·filing 1995–2006
92Inventor score
Top patents by PatentIndex Score
16 records- 0193US6458253B2Thin film production process and optical deviceCANON KK·Filed 2001·Granted Oct 1, 2002·57 cites·18 claims
- 0281US5911856AMethod for forming thin filmCANON KK·Filed 1996·Granted Jun 15, 1999·55 cites·4 claims
- 0375US5661596AAntireflection film and exposure apparatus using the sameCANON KK·Filed 1995·Granted Aug 26, 1997·43 cites·7 claims
- 0470US7301695B2Anti-reflective film and optical element having anti-reflective filmCANON KK·Filed 2005·Granted Nov 27, 2007·5 cites·6 claims
- 0570US5885712AAnti-reflection film and optical system using the sameCANON KK·Filed 1997·Granted Mar 23, 1999·32 cites·15 claims
- 0669US6396626B1Antireflection film and optical element coated with the antireflection filmCANON KK·Filed 2000·Granted May 28, 2002·12 cites·22 claims
- 0769US6217719B1Process for thin film formation by sputteringCANON KK·Filed 1999·Granted Apr 17, 2001·30 cites·17 claims
- 0863US6472087B1Antireflection film, optical element with antireflection film, and production method of the antireflection filmCANON KK·Filed 1998·Granted Oct 29, 2002·27 cites·16 claims
- 0962US6261696B1Optical element with substrate containing fluorite as main ingredient, and method and apparatus for producing the optical elementCANON KABUSHIKA KAISHA·Filed 1997·Granted Jul 17, 2001·24 cites·14 claims
- 1055US7041391B2Method for forming thin filmsCANON KK·Filed 2002·Granted May 9, 2006·1 cites·3 claims
- 1154US7455880B2Optical element fabrication method, optical element, exposure apparatus, device fabrication methodCANON KK·Filed 2005·Granted Nov 25, 2008·0 cites·11 claims
- 1249US6383346B2Method for forming thin filmsCANON KK·Filed 1997·Granted May 7, 2002·11 cites·15 claims
- 1342US2002148981A1Optical element for use in exposure apparatus and rinsing method thereforFiled 2002·Application pending·0 cites
- 1441US2006199274A1Atmosphere conditioning method, exposure apparatus, and device manufacturing methodCANON KK·Filed 2006·Application pending·0 cites
- 1540US2003108665A1Optical element fabrication method, optical element, exposure apparatus, device fabrication methodFiled 2002·Application pending·0 cites
- 1640US2002166508A1Vacuum deposition system and thin-film deposition processFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →