Inventor · disambiguated record
Jung-Sung Hwang
Also filed as: HWANG JUNG-SUNG
17 granted patents·7 pending applications·278 citations·filing 1996–2008
94Inventor score
Top patents by PatentIndex Score
24 records- 0187US6996453B2Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer moduleSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Feb 7, 2006·52 cites·6 claims
- 0281US6295864B1Analysis system and method for water-soluble contaminants in a cleanroom environmentSAMSUNG ELECTRONICS CO LTD·Filed 1999·Granted Oct 2, 2001·64 cites·33 claims
- 0378US5890367AAir conditioning system for semiconductor clean room including a chemical filter downstream of a humidifierSAMSUNG ELECTRONICS CO LTD·Filed 1997·Granted Apr 6, 1999·62 cites·3 claims
- 0477US8469650B2Method of controlling pressure in a wafer transfer systemLEE SOO-WOONG·Filed 2008·Granted Jun 25, 2013·5 cites·19 claims
- 0575US6849100B2Fresh air ducts including downstream filters for clean roomsSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Feb 1, 2005·25 cites·21 claims
- 0671US7438514B2Wafer transfer systemSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Oct 21, 2008·12 cites·17 claims
- 0761US7047793B2Sensitive substance and surface acoustic wave gas sensor using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted May 23, 2006·3 cites·20 claims
- 0859US6387333B2Gas purifying systemSAMSUNG ELECTRONICS CO LTD·Filed 2001·Granted May 14, 2002·2 cites·13 claims
- 0958US7988122B2Vibration control pedestal and installation method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2007·Granted Aug 2, 2011·2 cites·13 claims
- 1052US6093229ADrive checking system for fan filter units in clean roomSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted Jul 25, 2000·19 cites·13 claims
- 1150US2005115213A1Fresh air ducts including downstream filters for clean roomsFiled 2005·Application pending·0 cites
- 1248US7326284B2Contamination control system and air-conditioning system of a substrate processing apparatus using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Feb 5, 2008·2 cites·22 claims
- 1342US2006021934A1Method and system for fabricating filter structureCHO CHANG-MIN·Filed 2005·Application pending·0 cites
- 1442US2008160905A1Exhaust unit, exhausting method, and semiconductor manufacturing facility with the exhaust unitKIM MOON-JEONG·Filed 2007·Application pending·0 cites
- 1539US2006002833A1Apparatus to suppress ascending gas flow and method for exhaust control thereofCHOI HYUNG-SEOK·Filed 2005·Application pending·0 cites
- 1638US6098023ADriving control system and monitoring device for fan filter unit in semiconductor clean roomSAMSUNG ELECTRONICS CO LTD·Filed 1997·Granted Aug 1, 2000·8 cites·20 claims
- 1738US5972293AAqueous compositions for making ultrapure water used in microelectronic device fabrication processes and methods of sterilizing ultrapure water delivery systems using the sameSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted Oct 26, 1999·11 cites·10 claims
- 1838US2002121077A1Filter medium, filter and apparatus for supplying air or chemical equipped with the sameFiled 2002·Application pending·0 cites
- 1937US7161660B2Photolithography system and method of monitoring the sameSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Jan 9, 2007·0 cites·15 claims
- 2037US2004144316A1Apparatus for processing a substrateLEE SOO-WOONG·Filed 2003·Application pending·0 cites
- 2137US2006003684A1Grating and clean room system comprising the sameHWANG JUNG-SUNG·Filed 2005·Application pending·0 cites
- 2235US5871812AApparatus and method for depositing molecular impurities on a semiconductor waferSAMSUNG ELECTRONICS CO LTD·Filed 1996·Granted Feb 16, 1999·6 cites·8 claims
- 2334US6176120B1Methods of analyzing water soluble contaminants generated during microelectronic device manufacturing processesSAMSUNG ELECTRONICS CO LTD·Filed 1999·Granted Jan 23, 2001·4 cites·21 claims
- 2433US7156892B2Filter protection device for preventing damage to an air filterSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Jan 2, 2007·1 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →