Inventor · disambiguated record
Koji Shigematsu
Also filed as: SHIGEMATSU KOJI
29 granted patents·8 pending applications·515 citations·filing 1995–2018
97Inventor score
Top patents by PatentIndex Score
37 records- 0197US7558107B2Non volatile memoryRENESAS TECH CORP·Filed 2007·Granted Jul 7, 2009·52 cites·4 claims
- 0295US9140990B2Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodTANITSU OSAMU·Filed 2011·Granted Sep 22, 2015·8 cites·9 claims
- 0395US6259508B1Projection optical system and exposure apparatus and methodNIKON CORP·Filed 1999·Granted Jul 10, 2001·136 cites·29 claims
- 0493US6912155B2Non volatile memoryRENESAS TECH CORP·Filed 2003·Granted Jun 28, 2005·59 cites·15 claims
- 0592US9423694B2Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodNIKON CORP·Filed 2013·Granted Aug 23, 2016·4 cites·34 claims
- 0690US6600550B1Exposure apparatus, a photolithography method, and a device manufactured by the sameNIKON CORP·Filed 2000·Granted Jul 29, 2003·33 cites·9 claims
- 0787US10168620B2Illumination optical system, exposure apparatus and device manufacturing methodNIKON CORP·Filed 2016·Granted Jan 1, 2019·2 cites·14 claims
- 0887US6567319B2Nonvolatile semiconductor memory with controlled supply of boosted voltageHITACHI LTD·Filed 2002·Granted May 20, 2003·40 cites·4 claims
- 0979US6700645B1Projection optical system and exposure apparatus and methodNIKON CORP·Filed 2000·Granted Mar 2, 2004·17 cites·29 claims
- 1078US9235133B2Lighting optical device, regulation method for lighting optical device, exposure system, and exposure methodTANAKA HIROHISA·Filed 2005·Granted Jan 12, 2016·5 cites·28 claims
- 1176US9429848B2Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodTANITSU OSAMU·Filed 2008·Granted Aug 30, 2016·6 cites·17 claims
- 1276US6333781B1Projection optical system and exposure apparatus and methodNIKON CORP·Filed 1998·Granted Dec 25, 2001·37 cites·56 claims
- 1375US5963472AInformation storage apparatus and method for operating the sameNIPPON KOKAN KK·Filed 1998·Granted Oct 5, 1999·37 cites·26 claims
- 1473US7426136B2Non volatile memoryRENESAS TECH CORP·Filed 2005·Granted Sep 16, 2008·6 cites·5 claims
- 1568US8004658B2Lighting optical device, exposure system, and exposure methodNIKON CORP·Filed 2005·Granted Aug 23, 2011·2 cites·48 claims
- 1667US6418065B2Nonvolatile semiconductor memoryHITACHI LTD·Filed 2001·Granted Jul 9, 2002·14 cites·14 claims
- 1766US6084723AExposure apparatusNIKON CORP·Filed 1996·Granted Jul 4, 2000·31 cites·35 claims
- 1865US2018341185A1Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodNIKON CORP·Filed 2018·Application pending·0 cites
- 1964US9563130B2Illumination optical system, exposure apparatus and device manufacturing methodNIKON CORP·Filed 2014·Granted Feb 7, 2017·0 cites·13 claims
- 2063US10520825B2Illumination optical system, exposure apparatus and device manufacturing methodNIKON CORP·Filed 2018·Granted Dec 31, 2019·0 cites·15 claims
- 2163US10007194B2Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodTANITSU OSAMU·Filed 2008·Granted Jun 26, 2018·1 cites·7 claims
- 2263US6912094B2Projection optical system, a projection exposure apparatus, and a projection exposure methodNIKON CORP·Filed 2001·Granted Jun 28, 2005·10 cites·77 claims
- 2362US2017227854A1Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodNIKON CORP·Filed 2017·Application pending·0 cites
- 2460US10241417B2Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodNIKON CORP·Filed 2013·Granted Mar 26, 2019·0 cites·32 claims
- 2560US10234770B2Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodNIKON CORP·Filed 2013·Granted Mar 19, 2019·0 cites·33 claims
- 2658US8325324B2Illuminating optical apparatus, exposure apparatus and device manufacturing methodSHIGEMATSU KOJI·Filed 2008·Granted Dec 4, 2012·1 cites·31 claims
- 2757US7808828B2Non volatile memoryRENESAS ELECTRONICS CORP·Filed 2009·Granted Oct 5, 2010·2 cites·6 claims
- 2855US2009316132A1Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodNIKON CORP·Filed 2009·Application pending·0 cites
- 2950US5848002AInformation storage apparatus and method for operating the sameNIPPON KOKAN KK·Filed 1995·Granted Dec 8, 1998·12 cites·18 claims
- 3050US2006170901A1Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodNIKON CORP·Filed 2006·Application pending·0 cites
- 3149US8934086B2Illumination optical system, exposure apparatus and device manufacturing methodSHIGEMATSU KOJI·Filed 2011·Granted Jan 13, 2015·0 cites·32 claims
- 3246US2009135396A1Illuminating optical apparatus, exposure apparatus and device manufacturing methodNIKON CORP·Filed 2008·Application pending·0 cites
- 3345US2014043594A1Method of adjusting lighting optical device, lighting optical device, exposure system, and exposure methodNIKON CORP·Filed 2013·Application pending·0 cites
- 3445US2008246932A1Exposure apparatus, device manufacturing method and exposure methodNIKON CORP·Filed 2007·Application pending·0 cites
- 3544US2007146676A1Method of adjusting lighting optical device, lighting optical device, exposure system, and exposure methodNIKON CORP·Filed 2006·Application pending·0 cites
- 3643US6947121B2Projection optical system, a projection exposure apparatus provided with the same, as well as a device manufacturing methodNIKON CORP·Filed 2003·Granted Sep 20, 2005·0 cites·18 claims
- 3737US7154585B2Projection optical system, exposure apparatus, and device production methodNIKON CORP·Filed 2003·Granted Dec 26, 2006·0 cites·46 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →