Inventor · disambiguated record
Prasad N. Gadgil
Also filed as: GADGIL PRASAD · GADGIL PRASAD N · GADGIL PRASAD NARHAR
8 granted patents·5 pending applications·3,314 citations·filing 1991–2016
93Inventor score
Files withGENUS INC3GADGIL PRASAD N2GADGIL PRASAD1GADGIL PRASAD NARHAR1GM GLOBAL TECH OPERATIONS LLC1
Top patents by PatentIndex Score
13 records- 0198US9896763B2Particle reactor for atomic layer deposition (ALD) and chemical vapor deposition (CVD) processesGM GLOBAL TECH OPERATIONS LLC·Filed 2016·Granted Feb 20, 2018·31 cites·4 claims
- 0298US6174377B1Processing chamber for atomic layer deposition processesGENUS INC·Filed 1999·Granted Jan 16, 2001·639 cites·9 claims
- 0398US5879459AVertically-stacked process reactor and cluster tool system for atomic layer depositionGENUS INC·Filed 1997·Granted Mar 9, 1999·1.2k cites·25 claims
- 0498US5284519AInverted diffuser stagnation point flow reactor for vapor deposition of thin filmsUNIV FRASER SIMON·Filed 1991·Granted Feb 8, 1994·594 cites·17 claims
- 0597US6812157B1Apparatus for atomic layer chemical vapor depositionFiled 2000·Granted Nov 2, 2004·614 cites·19 claims
- 0696US6387185B2Processing chamber for atomic layer deposition processesGENUS INC·Filed 2001·Granted May 14, 2002·123 cites·10 claims
- 0791US7365005B1Method for filling of a recessed structure of a semiconductor deviceGADGIL PRASAD N·Filed 2005·Granted Apr 29, 2008·31 cites·1 claims
- 0891US6563092B1Measurement of substrate temperature in a process chamber using non-contact filtered infrared pyrometryNOVELLUS SYSTEMS INC·Filed 2001·Granted May 13, 2003·73 cites·28 claims
- 0950US2009304924A1Apparatus and method for large area multi-layer atomic layer chemical vapor processing of thin filmsGADGIL PRASAD·Filed 2006·Application pending·0 cites
- 1044US2010213643A1Rapid synthesis of polycrystalline silicon sheets for photo-voltaic solar cell manufacturingGADGIL PRASAD N·Filed 2010·Application pending·0 cites
- 1143US2005016453A1Collection of unused precursors in ALDFiled 2004·Application pending·0 cites
- 1242US2004224504A1Apparatus and method for plasma enhanced monolayer processingFiled 2004·Application pending·0 cites
- 1342US2015329965A1Methods of low temperature deposition of ceramic thin filmsGADGIL PRASAD NARHAR·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →