Inventor · disambiguated record
Moyuru Yasuhara
Also filed as: YASUHARA MOYURU
6 granted patents·2 pending applications·145 citations·filing 2000–2004
86Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0185US7138607B2Determining method of thermal processing conditionTOKYO ELECTRON LTD·Filed 2004·Granted Nov 21, 2006·30 cites·22 claims
- 0285US6803548B2Batch-type heat treatment apparatus and control method for the batch-type heat treatment apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Oct 12, 2004·36 cites·21 claims
- 0380US6329643B1Method of temperature-calibrating heat treating apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Dec 11, 2001·28 cites·20 claims
- 0478US6730885B2Batch type heat treatment system, method for controlling same, and heat treatment methodTOKYO ELECTRON LTD·Filed 2001·Granted May 4, 2004·23 cites·17 claims
- 0575US6787377B2Determining method of thermal processing conditionTOKYO ELECTRON LTD·Filed 2001·Granted Sep 7, 2004·16 cites·31 claims
- 0668US6495805B2Method of determining set temperature trajectory for heat treatment systemTOKYO ELECTRON LTD·Filed 2001·Granted Dec 17, 2002·12 cites·20 claims
- 0738US2007076942A1Semiconductor device manufacturing systemYATSUGAKE YASUO·Filed 2004·Application pending·0 cites
- 0835US2002127828A1Method of processing waferFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →