Inventor · disambiguated record
Sunao Aya
Also filed as: AYA SUNAO
12 granted patents·1 pending application·398 citations·filing 1996–2024
90Inventor score
Files withMITSUBISHI ELECTRIC CORP9EBIIKE YUJI1HINO SHIRO1SANAN JAPAN TECH CORPORATION1WATANABE TOMOKATSU1
Top patents by PatentIndex Score
13 records- 0195US6265113B1Stress adjustment method of X-ray maskMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Jul 24, 2001·344 cites·18 claims
- 0277US10043635B2Ion implantation apparatusMITSUBISHI ELECTRIC CORP·Filed 2014·Granted Aug 7, 2018·3 cites·8 claims
- 0376US9093361B2Semiconductor deviceHINO SHIRO·Filed 2012·Granted Jul 28, 2015·5 cites·12 claims
- 0460US5677090AMethod of making X-ray mask having reduced stressMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Oct 14, 1997·20 cites·7 claims
- 0556US8252672B2Silicon carbide semiconductor device comprising silicon carbide layer and method of manufacturing the sameWATANABE TOMOKATSU·Filed 2008·Granted Aug 28, 2012·1 cites·6 claims
- 0656US2024258423A1Semiconductor deviceSANAN JAPAN TECH CORPORATION·Filed 2024·Application pending·0 cites
- 0754US9059086B2Method of manufacturing semiconductor deviceEBIIKE YUJI·Filed 2011·Granted Jun 16, 2015·1 cites·12 claims
- 0849US6212252B1X-ray mask provided with an alignment mark and method of manufacturing the sameMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Apr 3, 2001·13 cites·11 claims
- 0948US9188872B2Method for manufacturing semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 2014·Granted Nov 17, 2015·0 cites·7 claims
- 1044US9063428B2Method for manufacturing semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 2014·Granted Jun 23, 2015·0 cites·8 claims
- 1140US5953492AMethod of manufacturing X-ray mask and heating apparatusMITSUBISHI ELECTRIC CORP·Filed 1997·Granted Sep 14, 1999·6 cites·10 claims
- 1234US5834142AMethod of manufacturing X-ray mask and heating apparatusMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Nov 10, 1998·3 cites·18 claims
- 1333US6190808B1X-ray mask and method of manufacturing the sameMITSUBISHI ELECTRIC CORP·Filed 1999·Granted Feb 20, 2001·2 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Sunao Aya files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →