Inventor · disambiguated record
Atsushi Yokohata
Also filed as: YOKOHATA ATSUSHI
4 granted patents·10 citations·filing 2015–2018
67Inventor score
Files withSHINETSU CHEMICAL CO4
Top patents by PatentIndex Score
4 records- 0189US10295477B2Methods for defect inspection, sorting, and manufacturing photomask blankSHINETSU CHEMICAL CO·Filed 2018·Granted May 21, 2019·4 cites·18 claims
- 0284US9829787B2Defect inspecting method, sorting method, and producing method for photomask blankSHINETSU CHEMICAL CO·Filed 2016·Granted Nov 28, 2017·3 cites·15 claims
- 0380US9772551B2Evaluation method of defect size of photomask blank, selection method, and manufacturing methodSHINETSU CHEMICAL CO·Filed 2015·Granted Sep 26, 2017·2 cites·18 claims
- 0473US9829442B2Defect inspecting method, sorting method and producing method for photomask blankSHINETSU CHEMICAL CO·Filed 2016·Granted Nov 28, 2017·1 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →