Inventor · disambiguated record
Edmund Minshall
Also filed as: MINSHALL EDMUND · MINSHALL EDMUND B
14 granted patents·2 pending applications·392 citations·filing 2002–2020
94Inventor score
Top patents by PatentIndex Score
16 records- 0198US6755954B2Electrochemical treatment of integrated circuit substrates using concentric anodes and variable field shaping elementsNOVELLUS SYSTEMS INC·Filed 2002·Granted Jun 29, 2004·140 cites·37 claims
- 0297US9758868B1Plasma suppression behind a showerhead through the use of increased pressureLAM RES CORP·Filed 2016·Granted Sep 12, 2017·24 cites·13 claims
- 0397US8043958B1Capping before barrier-removal IC fabrication methodNOVELLUS SYSTEMS INC·Filed 2010·Granted Oct 25, 2011·26 cites·13 claims
- 0496US7605082B1Capping before barrier-removal IC fabrication methodNOVELLUS SYSTEMS INC·Filed 2005·Granted Oct 20, 2009·36 cites·14 claims
- 0593US8415261B1Capping before barrier-removal IC fabrication methodREID JONATHAN D·Filed 2011·Granted Apr 9, 2013·12 cites·6 claims
- 0693US7811925B1Capping before barrier-removal IC fabrication methodNOVELLUS SYSTEMS INC·Filed 2008·Granted Oct 12, 2010·16 cites·20 claims
- 0791US7048316B1Compound angled pad end-effectorNOVELLUS SYSTEMS INC·Filed 2002·Granted May 23, 2006·64 cites·25 claims
- 0890US7690324B1Small-volume electroless plating cellNOVELLUS SYSTEMS INC·Filed 2005·Granted Apr 6, 2010·21 cites·32 claims
- 0987US6815349B1Electroless copper deposition apparatusNOVELLUS SYSTEMS INC·Filed 2002·Granted Nov 9, 2004·34 cites·31 claims
- 1079US10622243B2Planar substrate edge contact with open volume equalization pathways and side containmentLAM RES CORP·Filed 2017·Granted Apr 14, 2020·2 cites·19 claims
- 1166US8257781B1Electroless plating-liquid systemWEBB ERIC G·Filed 2005·Granted Sep 4, 2012·5 cites·77 claims
- 1265US7229339B2CMP apparatus and methodNOVELLUS SYSTEMS INC·Filed 2004·Granted Jun 12, 2007·12 cites·11 claims
- 1363US11443975B2Planar substrate edge contact with open volume equalization pathways and side containmentLAM RES CORP·Filed 2020·Granted Sep 13, 2022·0 cites·24 claims
- 1444US2016056032A1Methods and apparatuses for stable deposition rate control in low temperature ald systems by showerhead active heating and/or pedestal coolingLAM RES CORP·Filed 2014·Application pending·0 cites
- 1538US2004065540A1Liquid treatment using thin liquid layerNOVELLUS SYSTEMS INC·Filed 2003·Application pending·0 cites
- 1634US10115608B2Method and apparatus for rapid pump-down of a high-vacuum loadlockNOVELLUS SYSTEMS INC·Filed 2013·Granted Oct 30, 2018·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →