Inventor · disambiguated record
Mitsuo Natsume
Also filed as: NATSUME MITSUO
10 granted patents·3 pending applications·86 citations·filing 2008–2019
88Inventor score
Technology areasH10P
Top patents by PatentIndex Score
13 records- 0194US8596312B2Gas charging apparatus, gas discharging apparatus, gas charging method, and gas discharging methodNATSUME MITSUO·Filed 2011·Granted Dec 3, 2013·38 cites·16 claims
- 0289US9174253B2Purge nozzle unit, purge apparatus and load portSINFONIA TECHNOLOGY CO LTD·Filed 2013·Granted Nov 3, 2015·10 cites·5 claims
- 0388US9704727B2EfemSINFONIA TECHNOLOGY CO LTD·Filed 2014·Granted Jul 11, 2017·10 cites·17 claims
- 0486US9916997B2End structure of nozzle, purging device, and load portSINFONIA TECHNOLOGY CO LTD·Filed 2016·Granted Mar 13, 2018·6 cites·17 claims
- 0577US9239228B2Wafer mapping apparatus and load port including sameSINFONIA TECHNOLOGY CO LTD·Filed 2015·Granted Jan 19, 2016·3 cites·5 claims
- 0677US7793906B2Clamping mechanismSHINKO ELECTRIC CO LTD·Filed 2008·Granted Sep 14, 2010·6 cites·8 claims
- 0775US8444125B2Attaching apparatus for load port apparatusNATSUME MITSUO·Filed 2010·Granted May 21, 2013·4 cites·12 claims
- 0874US8821098B2Load portNATSUME MITSUO·Filed 2009·Granted Sep 2, 2014·6 cites·17 claims
- 0972US9412634B2Atmosphere replacement apparatus, substrate transport apparatus, substrate transport system, and EFEMSINFONIA TECHNOLOGY CO LTD·Filed 2014·Granted Aug 9, 2016·3 cites·19 claims
- 1053US2019145641A1Method for manufacturing semiconductorSINFONIA TECHNOLOGY CO LTD·Filed 2019·Application pending·0 cites
- 1152US2015024671A1Efem and load portSINFONIA TECHNOLOGY CO LTD·Filed 2014·Application pending·0 cites
- 1245US2009142170A1LoadportSHINKO ELECTRIC LTD·Filed 2008·Application pending·0 cites
- 1339US9685359B2Load port deviceSINFONIA TECHNOLOGY CO LTD·Filed 2014·Granted Jun 20, 2017·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →