Inventor · disambiguated record
Phillip Walsh
Also filed as: WALSH PHILLIP · WALSH PHILLIP D · WALSH PHILLIP M
23 granted patents·6 pending applications·148 citations·filing 1986–2019
95Inventor score
Files withVUV ANALYTICS INC7WALSH PHILLIP7N & K TECHNOLOGY INC4JORDAN VALLEY SEMICONDUCTORS3METROSOL INC3
Top patents by PatentIndex Score
29 records- 0194US9116158B2Vacuum ultraviolet absorption spectroscopy system and methodVUV ANALYTICS INC·Filed 2013·Granted Aug 25, 2015·13 cites·12 claims
- 0292US10641749B2Vacuum ultraviolet absorption spectroscopy system and methodVUV ANALYTICS INC·Filed 2019·Granted May 5, 2020·3 cites·11 claims
- 0392US7990549B2Method and apparatus for optically measuring periodic structures using orthogonal azimuthal sample orientationJORDAN VALLEY SEMICONDUCTORS·Filed 2009·Granted Aug 2, 2011·17 cites·18 claims
- 0489US7282703B2Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurementMETROSOL INC·Filed 2006·Granted Oct 16, 2007·17 cites·17 claims
- 0588US9976996B2Vacuum ultraviolet absorption spectroscopy system and methodVUV ANALYTICS INC·Filed 2016·Granted May 22, 2018·2 cites·22 claims
- 0686US7511265B2Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurementMETROSOL INC·Filed 2006·Granted Mar 31, 2009·11 cites·41 claims
- 0783US4654761APeriscopic vehicle lamp lens and lens arrangement including sameGEN MOTORS CORP·Filed 1986·Granted Mar 31, 1987·47 cites·8 claims
- 0878US7948631B2Method and apparatus for using multiple relative reflectance measurements to determine properties of a sample using vacuum ultra violet wavelengthsJORDAN VALLEY SEMICONDUCTORS·Filed 2009·Granted May 24, 2011·4 cites·39 claims
- 0977US7349103B1System and method for high intensity small spot optical metrologyN & K TECHNOLOGY INC·Filed 2005·Granted Mar 25, 2008·10 cites·30 claims
- 1076US8867041B2Optical vacuum ultra-violet wavelength nanoimprint metrologyWALSH PHILLIP·Filed 2012·Granted Oct 21, 2014·3 cites·14 claims
- 1173US9465015B2Vacuum ultraviolet absorption spectroscopy system and methodVUVA ANALYTICS INC·Filed 2014·Granted Oct 11, 2016·1 cites·18 claims
- 1270US7253909B1Phase shift measurement using transmittance spectraN & K TECHNOLOGY INC·Filed 2005·Granted Aug 7, 2007·2 cites·24 claims
- 1367US10338040B2Vacuum ultraviolet absorption spectroscopy system and methodVUV ANALYTICS INC·Filed 2016·Granted Jul 2, 2019·0 cites·9 claims
- 1467US9891197B2Vacuum ultraviolet absorption spectroscopy system and methodVUV ANALYTICS INC·Filed 2016·Granted Feb 13, 2018·0 cites·26 claims
- 1567US8153987B2Automated calibration methodology for VUV metrology systemHURST JEFFREY B·Filed 2009·Granted Apr 10, 2012·4 cites·18 claims
- 1667US6891628B2Method and apparatus for examining features on semi-transparent and transparent substratesN & K TECHNOLOGY INC·Filed 2003·Granted May 10, 2005·5 cites·34 claims
- 1766US9696286B2Vacuum ultraviolet absorption spectroscopy system and methodVUV ANALYTICS INC·Filed 2016·Granted Jul 4, 2017·0 cites·19 claims
- 1864US7663097B2Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurementMETROSOL INC·Filed 2007·Granted Feb 16, 2010·4 cites·82 claims
- 1964US7212293B1Optical determination of pattern feature parameters using a scalar model having effective optical propertiesN & K TECHNOLOGY INC·Filed 2004·Granted May 1, 2007·5 cites·28 claims
- 2056US9310292B2Methods and apparatus for vacuum ultraviolet (VUV) or shorter wavelength circular dichroism spectroscopyVUVA ANALYTICS INC·Filed 2014·Granted Apr 12, 2016·0 cites·14 claims
- 2154US2009219537A1Method and apparatus for using multiple relative reflectance measurements to determine properties of a sample using vacuum ultra violet wavelengthsWALSH PHILLIP·Filed 2008·Application pending·0 cites
- 2253US2008129986A1Method and apparatus for optically measuring periodic structures using orthogonal azimuthal sample orientationsWALSH PHILLIP·Filed 2007·Application pending·0 cites
- 2351US8773662B2Methods and apparatus for vacuum ultraviolet (VUV) or shorter wavelength circular dichroism spectroscopyWALSH PHILLIP·Filed 2011·Granted Jul 8, 2014·0 cites·17 claims
- 2450US2012170021A1Method and apparatus for providing multiple wavelength reflectance magnitude and phase for a sampleWALSH PHILLIP·Filed 2009·Application pending·0 cites
- 2547US2010277741A1Combined optical metrology techniquesJORDAN VALLEY SEMICONDUCTORS·Filed 2010·Application pending·0 cites
- 2645US2008246951A1Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work-piecesWALSH PHILLIP·Filed 2008·Application pending·0 cites
- 2743US10302607B2Method for detailed and bulk classification analysis of complex samples using vacuum ultra-violet spectroscopy and gas chromatographyVUV ANALYTICS INC·Filed 2016·Granted May 28, 2019·0 cites·29 claims
- 2841US2007051419A1DuctWALSH PHILLIP M·Filed 2006·Application pending·0 cites
- 2940US8564780B2Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work piecesWALSH PHILLIP·Filed 2010·Granted Oct 22, 2013·0 cites·26 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →