Inventor · disambiguated record
Masahito Ishihara
Also filed as: ISHIHARA MASAHITO
15 granted patents·4 pending applications·426 citations·filing 1985–2017
94Inventor score
Top patents by PatentIndex Score
19 records- 0192US7159537B2Device for fixing a gas showerhead or target plate to an electrode in plasma processing systemsANELVA CORP·Filed 2004·Granted Jan 9, 2007·54 cites·27 claims
- 0290US7848077B2Electrostatic chuck deviceCANON ANELVA CORP·Filed 2009·Granted Dec 7, 2010·10 cites·3 claims
- 0390US5925227AMultichamber sputtering apparatusANELVA CORP·Filed 1997·Granted Jul 20, 1999·90 cites·10 claims
- 0486US7791857B2Electrostatic chuck deviceCANON ANELVA CORP·Filed 2008·Granted Sep 7, 2010·7 cites·6 claims
- 0586US7623334B2Electrostatic chuck deviceCANON ANELVA CORP·Filed 2003·Granted Nov 24, 2009·25 cites·10 claims
- 0684US5624499ACVD apparatusANELVA CORP·Filed 1996·Granted Apr 29, 1997·70 cites·27 claims
- 0782US7724493B2Electrostatic chuck deviceCANON ANELVA CORP·Filed 2008·Granted May 25, 2010·5 cites·17 claims
- 0880US6129046ASubstrate processing apparatusANELVA CORP·Filed 1997·Granted Oct 10, 2000·46 cites·11 claims
- 0979US5944968ASputtering apparatusANELVA CORP·Filed 1997·Granted Aug 31, 1999·50 cites·5 claims
- 1074US10738380B2Deposition apparatusCANON ANELVA CORP·Filed 2017·Granted Aug 11, 2020·2 cites·17 claims
- 1173US6070552ASubstrate processing apparatusANELVA CORP·Filed 1998·Granted Jun 6, 2000·26 cites·5 claims
- 1267US7019263B2Substrate heating apparatus and multi-chamber substrate processing systemANELVA CORP·Filed 2004·Granted Mar 28, 2006·11 cites·32 claims
- 1365US2009229971A1Thin-Film Deposition SystemCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 1453US2006158823A1Electrostatic chuck deviceANELVA CORP·Filed 2006·Application pending·0 cites
- 1549US2005045101A1Thin-film deposition systemFiled 2004·Application pending·0 cites
- 1645US5956616AMethod of depositing thin films by plasma-enhanced chemical vapor depositionANELVA CORP·Filed 1997·Granted Sep 21, 1999·12 cites·14 claims
- 1745US4768268AMethod for manufacturing a single-piece type valve sleeveTOKAI TRW & CO·Filed 1987·Granted Sep 6, 1988·11 cites·8 claims
- 1840US4617883APivot members for a cam follower of valve mechanism for internal combustion engineHONDA MOTOR CO LTD·Filed 1985·Granted Oct 21, 1986·7 cites·4 claims
- 1928US2001052392A1Multichamber substrate processing apparatusFiled 1998·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →