Inventor · disambiguated record
Alexander Kuznetsov
Also filed as: KUZNETSOV ALEXANDER · KUZNETSOV ALEXANDER V · KUZNETSOV ALEXANDER VASILIEVIC · KUZNETSOV ALEXANDER VASILIEVICH
44 granted patents·8 pending applications·686 citations·filing 1997–2024
98Inventor score
Top patents by PatentIndex Score
52 records- 0198US9518916B1Compressive sensing for metrologyKLA TENCOR CORP·Filed 2014·Granted Dec 13, 2016·38 cites·29 claims
- 0297US10895541B2Systems and methods for combined x-ray reflectometry and photoelectron spectroscopyKLA TENCOR CORP·Filed 2018·Granted Jan 19, 2021·21 cites·20 claims
- 0397US7205912B1Structured set partitioning and multilevel coding for partial response channelsSEAGATE TECHNOLOGY LLC·Filed 2005·Granted Apr 17, 2007·42 cites·20 claims
- 0497US6757122B1Method and decoding apparatus using linear code with parity check matrices composed from circulantsSEAGATE TECHNOLOGY LLC·Filed 2002·Granted Jun 29, 2004·138 cites·20 claims
- 0596US9291554B2Method of electromagnetic modeling of finite structures and finite illumination for metrology and inspectionKUZNETSOV ALEXANDER·Filed 2014·Granted Mar 22, 2016·67 cites·23 claims
- 0696US9243886B1Optical metrology of periodic targets in presence of multiple diffraction ordersKLA TENCOR CORP·Filed 2013·Granted Jan 26, 2016·34 cites·25 claims
- 0796US8860937B1Metrology systems and methods for high aspect ratio and large lateral dimension structuresKLA TENCOR CORP·Filed 2013·Granted Oct 14, 2014·35 cites·19 claims
- 0895US8879073B2Optical metrology using targets with field enhancement elementsKLA TENCOR CORP·Filed 2013·Granted Nov 4, 2014·23 cites·20 claims
- 0994US11333621B2Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffractionKLA TENCOR CORP·Filed 2018·Granted May 17, 2022·10 cites·27 claims
- 1094US11143604B1Soft x-ray optics with improved filteringKLA CORP·Filed 2020·Granted Oct 12, 2021·4 cites·9 claims
- 1194US11036898B2Measurement models of nanowire semiconductor structures based on re-useable sub-structuresKLA TENCOR CORP·Filed 2019·Granted Jun 15, 2021·13 cites·20 claims
- 1294US7000168B2Method and coding apparatus using low density parity check codes for data storage or data transmissionSEAGATE TECHNOLOGY LLC·Filed 2002·Granted Feb 14, 2006·74 cites·19 claims
- 1393US11604420B2Self-calibrating overlay metrologyKLA CORP·Filed 2021·Granted Mar 14, 2023·2 cites·44 claims
- 1493US10769320B2Integrated use of model-based metrology and a process modelKLA TENCOR CORP·Filed 2013·Granted Sep 8, 2020·23 cites·30 claims
- 1593US10352876B2Signal response metrology for scatterometry based overlay measurementsKLA—TENCOR CORP·Filed 2015·Granted Jul 16, 2019·7 cites·20 claims
- 1692US7827464B2Iterative read channel architectures with coded modulationSEAGATE TECHNOLOGY LLC·Filed 2006·Granted Nov 2, 2010·12 cites·18 claims
- 1792US7787205B2Detecting and correcting insertion and deletion of bits for bit patterned media storage systemsSEAGATE TECHNOLOGY LLC·Filed 2007·Granted Aug 31, 2010·12 cites·20 claims
- 1890US11698251B2Methods and systems for overlay measurement based on soft X-ray ScatterometryKLA CORP·Filed 2020·Granted Jul 11, 2023·2 cites·22 claims
- 1989US10712145B2Hybrid metrology for patterned wafer characterizationKLA TENCOR CORP·Filed 2017·Granted Jul 14, 2020·6 cites·20 claims
- 2089US10502694B2Methods and apparatus for patterned wafer characterizationKLA TENCOR CORP·Filed 2014·Granted Dec 10, 2019·7 cites·27 claims
- 2188US11156548B2Measurement methodology of advanced nanostructuresKLA TENCOR CORP·Filed 2018·Granted Oct 26, 2021·6 cites·20 claims
- 2286US11378451B2Bandgap measurements of patterned film stacks using spectroscopic metrologyKLA TENCOR CORP·Filed 2017·Granted Jul 5, 2022·3 cites·44 claims
- 2385US10816486B2Multilayer targets for calibration and alignment of X-ray based measurement systemsKLA TENCOR CORP·Filed 2019·Granted Oct 27, 2020·2 cites·28 claims
- 2483US11073487B2Methods and systems for characterization of an x-ray beam with high spatial resolutionKLA TENCOR CORP·Filed 2018·Granted Jul 27, 2021·3 cites·35 claims
- 2583US10983227B2On-device metrology using target decompositionKLA TENCOR CORP·Filed 2018·Granted Apr 20, 2021·3 cites·20 claims
- 2683US9255877B2Metrology system optimization for parameter trackingKLA TENCOR CORP·Filed 2014·Granted Feb 9, 2016·6 cites·20 claims
- 2782US6718502B1Precoders for partial response channelsINST DATA STORAGE·Filed 2000·Granted Apr 6, 2004·31 cites·22 claims
- 2881US11604063B2Self-calibrated overlay metrology using a skew training sampleKLA CORP·Filed 2021·Granted Mar 14, 2023·1 cites·26 claims
- 2977US5881071ADigital write-and-read method and signal processing apparatusHITACHI LTD·Filed 1997·Granted Mar 9, 1999·30 cites·41 claims
- 3076US11880142B2Self-calibrating overlay metrologyKLA CORP·Filed 2023·Granted Jan 23, 2024·0 cites·34 claims
- 3176US8307267B2Programmable soft-output Viterbi algorithm system and methodVENKATARAMANI RAMAN·Filed 2008·Granted Nov 6, 2012·4 cites·18 claims
- 3276US2024288388A1Soft X-Ray Optics With Improved FilteringKLA CORP·Filed 2024·Application pending·0 cites
- 3374US11460418B2Methods and systems for semiconductor metrology based on wavelength resolved soft X-ray reflectometryKLA CORP·Filed 2019·Granted Oct 4, 2022·2 cites·22 claims
- 3474US10215559B2Metrology of multiple patterning processesKLA TENCOR CORP·Filed 2015·Granted Feb 26, 2019·2 cites·20 claims
- 3571US12025575B2Soft x-ray optics with improved filteringKLA CORP·Filed 2021·Granted Jul 2, 2024·0 cites·9 claims
- 3671US11796390B2Bandgap measurements of patterned film stacks using spectroscopic metrologyKLA CORP·Filed 2022·Granted Oct 24, 2023·0 cites·14 claims
- 3771US10062157B2Compressive sensing for metrologyKLA TENCOR CORP·Filed 2016·Granted Aug 28, 2018·1 cites·21 claims
- 3870US10504759B2Semiconductor metrology with information from multiple processing stepsKLA TENCOR CORP·Filed 2017·Granted Dec 10, 2019·1 cites·20 claims
- 3970US8035909B2Coding technique for correcting media defect-related errors and random errorsSEAGATE TECHNOLOGY LLC·Filed 2008·Granted Oct 11, 2011·1 cites·14 claims
- 4067US11536674B2Systems and methods for combined reflectometry and photoelectron spectroscopyKLA CORP·Filed 2020·Granted Dec 27, 2022·0 cites·21 claims
- 4166US6933865B1Method and apparatus for coded symbol stuffing in recording systemsSEAGATE TECHNOLOGY LLC·Filed 2004·Granted Aug 23, 2005·13 cites·23 claims
- 4265US2024142948A1Methods And Systems For Monitoring Metrology Fleet ProductivityKLA CORP·Filed 2022·Application pending·0 cites
- 4361US8037398B2System for precoding parity bits to meet predetermined modulation constraintsSEAGATE TECHNOLOGY·Filed 2007·Granted Oct 11, 2011·4 cites·20 claims
- 4451US2023128610A1Continuous Machine Learning Model Training for Semiconductor ManufacturingKLA CORP·Filed 2021·Application pending·0 cites
- 4547US10580673B2Semiconductor metrology and defect classification using electron microscopyKLA TENCOR CORP·Filed 2018·Granted Mar 3, 2020·0 cites·22 claims
- 4646US7191386B2Method and apparatus for additive trellis encodingSEAGATE TECHNOLOGY LLC·Filed 2004·Granted Mar 13, 2007·3 cites·25 claims
- 4742US2023091374A1Systems and Methods for Improved Computer Vision in On-Device ApplicationsGOOGLE LLC·Filed 2020·Application pending·0 cites
- 4842US2020025554A1System, method and computer program product for fast automatic determination of signals for efficient metrologyKLA TENCOR CORP·Filed 2016·Application pending·0 cites
- 4941US10804167B2Methods and systems for co-located metrologyKLA TENCOR CORP·Filed 2019·Granted Oct 13, 2020·0 cites·63 claims
- 5037US2016139032A1Inspection system and method using an off-axis unobscured objective lensKLA TENCOR CORP·Filed 2015·Application pending·0 cites
Showing the top 50 of 52 patent records by PatentIndex Score.
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