Inventor · disambiguated record
Akihiro Nakauchi
Also filed as: NAKAUCHI AKIHIRO
14 granted patents·3 pending applications·70 citations·filing 2000–2013
90Inventor score
Top patents by PatentIndex Score
17 records- 0180US7403291B2Method of calculating two-dimensional wavefront aberrationCANON KK·Filed 2005·Granted Jul 22, 2008·6 cites·12 claims
- 0272US6977728B2Projection exposure apparatus and aberration measurement methodCANON KK·Filed 2002·Granted Dec 20, 2005·12 cites·11 claims
- 0371US7602473B2Exposure apparatus and device manufacturing method using the sameCANON KK·Filed 2006·Granted Oct 13, 2009·3 cites·12 claims
- 0470US7081962B2Aberration measuring apparatus for an optical system utilizing soft x-raysCANON KK·Filed 2004·Granted Jul 25, 2006·15 cites·4 claims
- 0569US6859264B2Projection exposure apparatus having aberration measurement deviceCANON KK·Filed 2001·Granted Feb 22, 2005·10 cites·55 claims
- 0665US7619748B2Exposure apparatus mounted with measuring apparatusCANON KK·Filed 2005·Granted Nov 17, 2009·3 cites·1 claims
- 0761US8004691B2Measuring apparatus, exposure apparatus and method, and device manufacturing methodCANON KK·Filed 2006·Granted Aug 23, 2011·3 cites·12 claims
- 0860US8823950B2Shape measurement apparatus, and shape measurement methodCANON KK·Filed 2013·Granted Sep 2, 2014·1 cites·11 claims
- 0959US6721056B1Surface shape measuring apparatus and methodCANON KK·Filed 2000·Granted Apr 13, 2004·9 cites·32 claims
- 1058US8345263B2Measurement method and measurement apparatus that measure a surface figure of an aspheric surface based on an interference patternCANON KK·Filed 2009·Granted Jan 1, 2013·3 cites·8 claims
- 1156US6650398B2Wavefront aberration measurement method and projection exposure apparatusCANON KK·Filed 2001·Granted Nov 18, 2003·4 cites·7 claims
- 1253US8314937B2Measurement method and measurement apparatus that measure a surface figure of an aspheric surface based on an interference patternNAKAUCHI AKIHIRO·Filed 2010·Granted Nov 20, 2012·1 cites·8 claims
- 1340US2014182150A1Measurement apparatus and measurement methodCANON KK·Filed 2013·Application pending·0 cites
- 1439US9719773B2Measuring method and measuring apparatusNAKAUCHI AKIHIRO·Filed 2010·Granted Aug 1, 2017·0 cites·20 claims
- 1537US2012010850A1Measurement apparatus and methodNAKAUCHI AKIHIRO·Filed 2011·Application pending·0 cites
- 1636US8868366B2Calculation method and calculation apparatusNAKAUCHI AKIHIRO·Filed 2010·Granted Oct 21, 2014·0 cites·6 claims
- 1735US2004174533A1Wavefront aberration measuring apparatusFiled 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →