Inventor · disambiguated record
Ryo Takai
Also filed as: TAKAI RYO
8 granted patents·1 pending application·83 citations·filing 2002–2023
79Inventor score
Top patents by PatentIndex Score
9 records- 0191US9804510B2Interferometer system, lithography apparatus, and article manufacturing methodCANON KK·Filed 2014·Granted Oct 31, 2017·12 cites·14 claims
- 0291US6819433B2Exposure apparatus including interferometer systemCANON KK·Filed 2002·Granted Nov 16, 2004·71 cites·37 claims
- 0363US12366812B2Detection apparatus, detection method, exposure apparatus and article manufacturing methodCANON KK·Filed 2023·Granted Jul 22, 2025·0 cites·12 claims
- 0458US11420430B2Polypropylene-based laminated filmTOYO BOSEKI·Filed 2019·Granted Aug 23, 2022·0 cites·10 claims
- 0556US10481509B2Vibration damping apparatus, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2019·Granted Nov 19, 2019·0 cites·25 claims
- 0650US9217937B2Interferometric measurement of rotation of stage apparatus and adjustment method thereof, exposure apparatus and method of manufacturing deviceCANON KK·Filed 2013·Granted Dec 22, 2015·0 cites·15 claims
- 0747US11246099B2Terminal using first or second transmit mode based on level of stored powerSONY SEMICONDUCTOR SOLUTIONS CORP·Filed 2019·Granted Feb 8, 2022·0 cites·10 claims
- 0839US10197926B2Exposure apparatus and method of manufacturing articleCANON KK·Filed 2016·Granted Feb 5, 2019·0 cites·17 claims
- 0936US2011051109A1Measurement apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →