Inventor · disambiguated record
Zaifeng Tang
Also filed as: TANG ZAIFENG
6 granted patents·3 pending applications·4 citations·filing 2012–2024
68Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0178US9842743B1Method of etching a shallow trenchSHANGHAI HUALI MICROELECT CORP·Filed 2016·Granted Dec 12, 2017·3 cites·9 claims
- 0259US8900887B2Method for etching polysilicon gateSHANGHAI HUALI MICROELECT CORP·Filed 2012·Granted Dec 2, 2014·1 cites·4 claims
- 0355US11911809B2Preventive maintenance method for chamber of metal etching machineSHANGHAI HUALI MICROELECT CORP·Filed 2022·Granted Feb 27, 2024·0 cites·7 claims
- 0453US2025140571A1Polysilicon gate etch methodSHANGHAI HUALI INTEGRATED CIRCUIT CORP·Filed 2024·Application pending·0 cites
- 0550US12374580B2Method for manufacturing shallow trench isolationSHANGHAI HUALI INTEGRATED CIRCUIT CORP·Filed 2022·Granted Jul 29, 2025·0 cites·10 claims
- 0645US2023162995A1Method for Improving Stability of Etching Rate of Etching ChamberSHANGHAI HUALI MICROELECT CORP·Filed 2022·Application pending·0 cites
- 0743US11972963B2Wafer transfer module and method thereof for transferring to-be-transferred waferSHANGHAI HUALI INTEGRATED CIRCUIT CORP·Filed 2021·Granted Apr 30, 2024·0 cites·6 claims
- 0841US2022165576A1Vacuum pumping valve for semiconductor equipment and vacuum control system thereofSHANGHAI HUALI INTEGRATED CIRCUIT CORP·Filed 2021·Application pending·0 cites
- 0939US8658502B2Method for reducing morphological difference between N-doped and undoped polysilicon gates after etchingSHANGHAI HUALI MICROELECT CORP·Filed 2012·Granted Feb 25, 2014·0 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →