Inventor · disambiguated record
Glenn Zubillaga
Also filed as: ZUBILLAGA GLENN · ZUBILLAGA GLENN W
25 granted patents·1 pending application·409 citations·filing 1998–2019
96Inventor score
Files withCOWANS KENNETH W5ADVANCED THERMAL SCIENCES CORP4BE AEROSPACE INC4BUCHBERGER JR DOUGLAS A4BRILLHART PAUL LUKAS3
Top patents by PatentIndex Score
26 records- 0198US7415835B2Thermal control system and methodADVANCED THERMAL SCIENCES CORP·Filed 2006·Granted Aug 26, 2008·119 cites·8 claims
- 0298US7178353B2Thermal control system and methodADVANCED THERMAL SCIENCES CORP·Filed 2005·Granted Feb 20, 2007·79 cites·30 claims
- 0396US8092639B2Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changesBUCHBERGER JR DOUGLAS A·Filed 2010·Granted Jan 10, 2012·20 cites·7 claims
- 0495US7765820B2Thermal control system and methodADVANCED THERMAL SCIENCES CORP·Filed 2008·Granted Aug 3, 2010·29 cites·36 claims
- 0593US8329586B2Method of processing a workpiece in a plasma reactor using feed forward thermal controlBUCHBERGER JR DOUGLAS A·Filed 2010·Granted Dec 11, 2012·11 cites·18 claims
- 0693US8221580B2Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a control processor governing both loopsBUCHBERGER JR DOUGLAS A·Filed 2006·Granted Jul 17, 2012·14 cites·18 claims
- 0792US8980044B2Plasma reactor with a multiple zone thermal control feed forward control apparatusBRILLHART PAUL LUKAS·Filed 2010·Granted Mar 17, 2015·10 cites·19 claims
- 0892US8337660B2Capacitively coupled plasma reactor having very agile wafer temperature controlBUCHBERGER JR DOUGLAS A·Filed 2010·Granted Dec 25, 2012·12 cites·13 claims
- 0992US8021521B2Method for agile workpiece temperature control in a plasma reactor using a thermal modelAPPLIED MATERIALS INC·Filed 2006·Granted Sep 20, 2011·13 cites·19 claims
- 1091US7988872B2Method of operating a capacitively coupled plasma reactor with dual temperature control loopsAPPLIED MATERIALS INC·Filed 2006·Granted Aug 2, 2011·19 cites·20 claims
- 1188US8453468B1System and method for thermal control of different heat loads from a single source of saturated fluidsCOWANS KENNETH W·Filed 2010·Granted Jun 4, 2013·9 cites·13 claims
- 1287US9360243B1Temperature control system and method TDSF plusCOWANS KENNETH W·Filed 2011·Granted Jun 7, 2016·5 cites·19 claims
- 1387US8546267B2Method of processing a workpiece in a plasma reactor using multiple zone feed forward thermal controlBRILLHART PAUL LUKAS·Filed 2010·Granted Oct 1, 2013·5 cites·7 claims
- 1482US8801893B2Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactorBRILLHART PAUL LUKAS·Filed 2010·Granted Aug 12, 2014·5 cites·16 claims
- 1579US8291719B2Thermal control system and methodCOWANS WILLIAM W·Filed 2008·Granted Oct 23, 2012·7 cites·12 claims
- 1678US9372020B2Method and apparatus for thermal exchange with two-phase mediaBE AEROSPACE INC·Filed 2013·Granted Jun 21, 2016·2 cites·3 claims
- 1777US8532832B2Method and apparatus for thermal exchange with two-phase mediaCOWANS KENNETH W·Filed 2009·Granted Sep 10, 2013·4 cites·19 claims
- 1874US7243500B2Heat exchanger and temperature control unitADVANCED THERMAL SCIENCES CORP·Filed 2005·Granted Jul 17, 2007·4 cites·16 claims
- 1971US11154073B1Temperature control system and method TDSF plusBE AEROSPACE INC·Filed 2019·Granted Oct 26, 2021·0 cites·6 claims
- 2071US8240160B2Thermal control system and methodCOWANS KENNETH W·Filed 2009·Granted Aug 14, 2012·4 cites·4 claims
- 2162US10386101B2Method and apparatus for thermal exchange with two-phase mediaBE AEROSPACE INC·Filed 2016·Granted Aug 20, 2019·0 cites·4 claims
- 2262US10342241B2Temperature control system and method TDSF plusBE AEROSPACE INC·Filed 2016·Granted Jul 9, 2019·0 cites·6 claims
- 2362US6209334B1Systems and methods for capacity regulation of refrigeration systemsB E AEROSPACE·Filed 2000·Granted Apr 3, 2001·15 cites·3 claims
- 2459US6109047ASystems and methods for capacity regulation of refrigeration systemsB E AEROSPACE·Filed 1998·Granted Aug 29, 2000·23 cites·26 claims
- 2555US8689575B2Thermal control system and methodCOWANS WILLIAM W·Filed 2012·Granted Apr 8, 2014·0 cites·7 claims
- 2651US2007095097A1Thermal control system and methodCOWANS KENNETH W·Filed 2006·Application pending·0 cites
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