Inventor · disambiguated record
Ayako Tani
Also filed as: TANI AYAKO
2 granted patents·1 citations·filing 2014–2015
31Inventor score
Technology areasG03F
Files withDAINIPPON PRINTING CO LTD2
Top patents by PatentIndex Score
2 records- 0163US9971238B2Mask blank, phase shift mask, and production method thereofDAINIPPON PRINTING CO LTD·Filed 2015·Granted May 15, 2018·1 cites·19 claims
- 0247US9874808B2Mask blank, mask blank with negative resist film, phase shift mask, and method for producing pattern formed body using sameDAINIPPON PRINTING CO LTD·Filed 2014·Granted Jan 23, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →