Inventor · disambiguated record
Fumio Satou
Also filed as: SATOU FUMIO
7 granted patents·267 citations·filing 1997–2002
89Inventor score
Top patents by PatentIndex Score
7 records- 0191US6159288AMethod and apparatus for cleaning treatmentTOKYO ELECTRON LTD·Filed 1997·Granted Dec 12, 2000·57 cites·10 claims
- 0284US6770149B2Method and apparatus for cleaning treatmentTOKYO ELECTRON LTD·Filed 2002·Granted Aug 3, 2004·19 cites·5 claims
- 0380US5945161AApparatus and method for supplying process solution to surface of substrate to be processedTOKYO ELECTRON LTD·Filed 1997·Granted Aug 31, 1999·60 cites·21 claims
- 0473US6198481B1Remote control transmission apparatusNIPPON ELECTRIC CO·Filed 1998·Granted Mar 6, 2001·63 cites·5 claims
- 0572US6261378B1Substrate cleaning unit and cleaning methodTOKYO ELECTRON LTD·Filed 1999·Granted Jul 17, 2001·43 cites·25 claims
- 0671US6391110B1Method and apparatus for cleaning treatmentTOKYO ELECTRON LTD·Filed 2000·Granted May 21, 2002·15 cites·4 claims
- 0768US6398879B1Method and apparatus for cleaning treatmentTOKYO ELECTRON LTD·Filed 2000·Granted Jun 4, 2002·10 cites·6 claims
Join the waitlist — get patent alerts
Get an alert when Fumio Satou files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →