Inventor · disambiguated record
Hae-Joong Park
Also filed as: PARK HAE-JOONG
3 granted patents·1 pending application·12 citations·filing 2008–2021
64Inventor score
Files withSAMSUNG ELECTRONICS CO LTD4
Top patents by PatentIndex Score
4 records- 0194US11501987B2Loadlock module and semiconductor manufacturing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Nov 15, 2022·3 cites·17 claims
- 0279US10971382B2Loadlock module and semiconductor manufacturing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Apr 6, 2021·2 cites·18 claims
- 0378US7869185B2Method of de-chucking wafer using direct voltage and alternating voltage, and apparatus for fabricating semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2008·Granted Jan 11, 2011·7 cites·16 claims
- 0443US2014273484A1Inductively coupled plasma processing apparatus and plasma processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →