Inventor · disambiguated record
Shigeru Takehiro
Also filed as: TAKEHIRO SHIGERU
2 granted patents·1 pending application·62 citations·filing 2002–2006
66Inventor score
Files withAPPLIED MATERIALS INC3
Top patents by PatentIndex Score
3 records- 0186US7354501B2Upper chamber for high density plasma CVDAPPLIED MATERIALS INC·Filed 2002·Granted Apr 8, 2008·39 cites·21 claims
- 0285US7074298B2High density plasma CVD chamberAPPLIED MATERIALS INC·Filed 2002·Granted Jul 11, 2006·23 cites·26 claims
- 0356US2006191478A1High density plasma CVD chamberAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →