Inventor · disambiguated record
Takahisa Shiozawa
Also filed as: SHIOZAWA TAKAHISA
22 granted patents·1,000 citations·filing 1989–2008
97Inventor score
Files withCANON KK22
Top patents by PatentIndex Score
22 records- 0197US4974919AIlluminating deviceCANON KK·Filed 1989·Granted Dec 4, 1990·191 cites·25 claims
- 0296US7345741B2Illumination optical system and exposure apparatusCANON KK·Filed 2005·Granted Mar 18, 2008·33 cites·28 claims
- 0396US6636295B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2001·Granted Oct 21, 2003·89 cites·14 claims
- 0496US5345292AIllumination device for projection exposure apparatusCANON KK·Filed 1993·Granted Sep 6, 1994·98 cites·60 claims
- 0593US5459547AIllumination deviceCANON KK·Filed 1993·Granted Oct 17, 1995·78 cites·50 claims
- 0692US5121160AExposure method and apparatusCANON KK·Filed 1991·Granted Jun 9, 1992·85 cites·34 claims
- 0791US5475491AExposure apparatusCANON KK·Filed 1994·Granted Dec 12, 1995·70 cites·57 claims
- 0888US5684567AExposure apparatus and device manufacturing method for projecting light from a secondary light source onto a mask or patternCANON KK·Filed 1995·Granted Nov 4, 1997·63 cites·14 claims
- 0987US5140366AExposure apparatus with a function for controlling alignment by use of latent imagesCANON KK·Filed 1991·Granted Aug 18, 1992·59 cites·22 claims
- 1085US5892573AExposure apparatus and method with multiple light receiving meansCANON KK·Filed 1996·Granted Apr 6, 1999·58 cites·22 claims
- 1184US5726740AProjection exposure apparatus having illumination device with ring-like or spot-like light sourceCANON KK·Filed 1995·Granted Mar 10, 1998·48 cites·24 claims
- 1281US7468781B2Exposure apparatusCANON KK·Filed 2007·Granted Dec 23, 2008·4 cites·4 claims
- 1372US7286206B2Exposure apparatusCANON KK·Filed 2006·Granted Oct 23, 2007·2 cites·2 claims
- 1469US6897944B2Illumination optical system, exposure method and apparatus using the sameCANON KK·Filed 2003·Granted May 24, 2005·9 cites·11 claims
- 1568US5491534AExposure apparatus and microdevice manufacturing method using the sameCANON KK·Filed 1994·Granted Feb 13, 1996·34 cites·33 claims
- 1666US7142283B2Exposure apparatusCANON KK·Filed 2004·Granted Nov 28, 2006·6 cites·18 claims
- 1763US5699148AExposure apparatus and microdevice manufacturing method using the sameCANON KK·Filed 1996·Granted Dec 16, 1997·25 cites·11 claims
- 1861US5719617AIllumination system for superposing light beams one upon another on a surface using a projecting system having different focal point positionsCANON KK·Filed 1995·Granted Feb 17, 1998·26 cites·26 claims
- 1958US5621499AScanning exposure apparatusCANON KK·Filed 1995·Granted Apr 15, 1997·17 cites·19 claims
- 2056US7760330B2Illumination optical system and exposure apparatusCANON KK·Filed 2008·Granted Jul 20, 2010·0 cites·16 claims
- 2152US6757050B1Exposure method and apparatus for detecting an exposure amount and for calculating a correction value based on the detected exposure amountCANON KK·Filed 1998·Granted Jun 29, 2004·4 cites·18 claims
- 2251US7671967B2Exposure apparatus and exposure methodCANON KK·Filed 2006·Granted Mar 2, 2010·1 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →