Inventor · disambiguated record
Hirofumi Katsumata
Also filed as: KATSUMATA HIROFUMI
5 granted patents·93 citations·filing 1986–2000
82Inventor score
Top patents by PatentIndex Score
5 records- 0183US6250914B1Wafer heating device and method of controlling the sameTOSHIBA MACHINE CO LTD·Filed 2000·Granted Jun 26, 2001·32 cites·4 claims
- 0262US5272644AApparatus for controlling a heating temperatureTOSHIBA MACHINE CO LTD·Filed 1990·Granted Dec 21, 1993·24 cites·8 claims
- 0361US6461428B2Method and apparatus for controlling rise and fall of temperature in semiconductor substratesTOSHIBA CERAMICS CO·Filed 2000·Granted Oct 8, 2002·6 cites·14 claims
- 0452US5486105AApparatus for controlling a heating temperatureTOSHIBA MACHINE CO LTD·Filed 1993·Granted Jan 23, 1996·17 cites·11 claims
- 0550US4750104AMethod of and apparatus for tracking position error controlTOSHIBA MACHINE CO LTD·Filed 1986·Granted Jun 7, 1988·14 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →