Inventor · disambiguated record
Chikara Nobukuni
Also filed as: NOBUKUNI CHIKARA
5 granted patents·9 citations·filing 2014–2023
70Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0188US11691172B2Liquid processing apparatus and liquid processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Jul 4, 2023·5 cites·11 claims
- 0278US10591935B2Substrate liquid processing apparatus and substrate liquid processing methodTOKYO ELECTRON LTD·Filed 2018·Granted Mar 17, 2020·3 cites·7 claims
- 0361US12070769B2Liquid processing apparatus and liquid processing methodTOKYO ELECTRON LTD·Filed 2023·Granted Aug 27, 2024·0 cites·10 claims
- 0456US10162371B2Substrate liquid processing apparatus and substrate liquid processing methodTOKYO ELECTRON LTD·Filed 2014·Granted Dec 25, 2018·1 cites·9 claims
- 0542US11043399B2Substrate processing apparatus and operation method of substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Jun 22, 2021·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →