Inventor · disambiguated record
Joeri Lof
Also filed as: LOF JOERI
91 granted patents·3 pending applications·4,764 citations·filing 2003–2021
99Inventor score
Top patents by PatentIndex Score
94 records- 0199US9740107B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Aug 22, 2017·10 cites·20 claims
- 0299US9366972B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jun 14, 2016·14 cites·20 claims
- 0399US9360765B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jun 7, 2016·13 cites·20 claims
- 0499US8482845B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Jul 9, 2013·32 cites·16 claims
- 0599US7593092B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Sep 22, 2009·60 cites·15 claims
- 0699US7593093B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Sep 22, 2009·67 cites·9 claims
- 0799US7388648B2Lithographic projection apparatusASML NETHERLANDS BV·Filed 2005·Granted Jun 17, 2008·136 cites·20 claims
- 0899US7352434B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 1, 2008·178 cites·43 claims
- 0999US7213963B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 8, 2007·196 cites·28 claims
- 1099US7199858B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Apr 3, 2007·409 cites·29 claims
- 1199US7193232B2Lithographic apparatus and device manufacturing method with substrate measurement not through liquidASML NETHERLANDS BV·Filed 2003·Granted Mar 20, 2007·216 cites·33 claims
- 1299US7081943B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jul 25, 2006·199 cites·51 claims
- 1399US7075616B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jul 11, 2006·366 cites·33 claims
- 1499US6952253B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Oct 4, 2005·1.8k cites·45 claims
- 1598US7936444B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted May 3, 2011·35 cites·35 claims
- 1698US7482611B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jan 27, 2009·65 cites·38 claims
- 1798US7372541B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted May 13, 2008·74 cites·32 claims
- 1898US7224436B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted May 29, 2007·110 cites·21 claims
- 1998US7110081B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Sep 19, 2006·128 cites·26 claims
- 2097US9097987B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Aug 4, 2015·14 cites·19 claims
- 2197US7932999B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Apr 26, 2011·22 cites·17 claims
- 2296US9798246B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Oct 24, 2017·5 cites·22 claims
- 2396US9482966B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2012·Granted Nov 1, 2016·12 cites·74 claims
- 2496US8154708B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2006·Granted Apr 10, 2012·23 cites·20 claims
- 2596US7795603B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Sep 14, 2010·15 cites·18 claims
- 2696US7738074B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jun 15, 2010·52 cites·20 claims
- 2796US7038760B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 2, 2006·78 cites·21 claims
- 2895US8472002B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Jun 25, 2013·7 cites·28 claims
- 2995US7982850B2Immersion lithographic apparatus and device manufacturing method with gas supplyASML NETHERLANDS BV·Filed 2008·Granted Jul 19, 2011·14 cites·20 claims
- 3095US7359030B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Apr 15, 2008·92 cites·19 claims
- 3195US7057702B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jun 6, 2006·89 cites·40 claims
- 3293US11372341B2Method for temperature control of a componentZEISS CARL SMT GMBH·Filed 2021·Granted Jun 28, 2022·3 cites·20 claims
- 3393US9091940B2Lithographic apparatus and method involving a fluid inlet and a fluid outletASML NETHERLANDS BV·Filed 2012·Granted Jul 28, 2015·5 cites·71 claims
- 3493US8797503B2Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structureLOF JOERI·Filed 2011·Granted Aug 5, 2014·5 cites·20 claims
- 3593US7808613B2Individual wafer history storage for overlay correctionsASML NETHERLANDS BV·Filed 2006·Granted Oct 5, 2010·17 cites·18 claims
- 3692US10656538B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted May 19, 2020·2 cites·20 claims
- 3792US9477160B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Oct 25, 2016·3 cites·20 claims
- 3891US9383655B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Jul 5, 2016·3 cites·20 claims
- 3988US8558989B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Oct 15, 2013·3 cites·33 claims
- 4087US10503084B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Dec 10, 2019·2 cites·20 claims
- 4186US10620545B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Apr 14, 2020·1 cites·20 claims
- 4286US7233384B2Lithographic apparatus and device manufacturing method, and device manufactured thereby for calibrating an imaging system with a sensorASML NETHERLANDS BV·Filed 2005·Granted Jun 19, 2007·10 cites·20 claims
- 4386US7197828B2Lithographic apparatus and device manufacturing method utilizing FPD chuck Z position measurementASML NETHERLANDS BV·Filed 2005·Granted Apr 3, 2007·16 cites·25 claims
- 4486US6936385B2Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methodsASML NETHERLANDS BV·Filed 2003·Granted Aug 30, 2005·37 cites·26 claims
- 4585US8823920B2Lithographic apparatus and device manufacturing methodSTREEFKERK BOB·Filed 2011·Granted Sep 2, 2014·2 cites·20 claims
- 4684US8913223B2Lithographic apparatus and device manufacturing methodSTREEFKERK BOB·Filed 2010·Granted Dec 16, 2014·2 cites·26 claims
- 4781US7931844B2Imprint lithographyASML NETHERLANDS BV·Filed 2008·Granted Apr 26, 2011·4 cites·20 claims
- 4879US11022903B2Method for temperature control of a componentZEISS CARL SMT GMBH·Filed 2020·Granted Jun 1, 2021·1 cites·20 claims
- 4977US7420676B2Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Sep 2, 2008·19 cites·25 claims
- 5077US7116404B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Oct 3, 2006·15 cites·42 claims
Showing the top 50 of 94 patent records by PatentIndex Score.
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