Inventor · disambiguated record
Fumio Iwamoto
Also filed as: IWAMOTO FUMIO
26 granted patents·3 pending applications·120 citations·filing 1992–2025
94Inventor score
Files withGIGAPHOTON INC22RAILWAY TECHNICAL RES INST2FUJI PHOTO FILM CO LTD1FUJIFILM CORP1MATSUSHITA ELECTRIC INDUSTRIAL CO LTD1
Top patents by PatentIndex Score
29 records- 0188US11067907B2Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2020·Granted Jul 20, 2021·2 cites·18 claims
- 0286US10629414B2Target supply device, target material refining method, recording medium having target material refining program recorded therein, and target generatorGIGAPHOTON INC·Filed 2019·Granted Apr 21, 2020·2 cites·22 claims
- 0384US9894744B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2016·Granted Feb 13, 2018·3 cites·18 claims
- 0483US6898851B2Electronic device manufacturing methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2003·Granted May 31, 2005·40 cites·20 claims
- 0580US10028366B2Extreme UV light generation device and target recovery apparatusGIGAPHOTON INC·Filed 2017·Granted Jul 17, 2018·2 cites·11 claims
- 0680US9854658B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2016·Granted Dec 26, 2017·2 cites·17 claims
- 0776US10582600B2Droplet collection deviceGIGAPHOTON INC·Filed 2019·Granted Mar 3, 2020·2 cites·4 claims
- 0876US9883574B2Target producing apparatusGIGAPHOTON INC·Filed 2016·Granted Jan 30, 2018·2 cites·3 claims
- 0975US10225917B2Target supply device and extreme ultraviolet light generating deviceGIGAPHOTON INC·Filed 2018·Granted Mar 5, 2019·2 cites·20 claims
- 1074US10506697B2Extreme ultraviolet light generation deviceGIGAPHOTON INC·Filed 2019·Granted Dec 10, 2019·1 cites·19 claims
- 1173US10251253B2Extreme ultraviolet light generation deviceGIGAPHOTON INC·Filed 2018·Granted Apr 2, 2019·1 cites·20 claims
- 1265US10009991B2Target supply apparatus and EUV light generating apparatusGIGAPHOTON INC·Filed 2016·Granted Jun 26, 2018·1 cites·14 claims
- 1365US9949354B2Extreme UV light generation apparatus and methodGIGAPHOTON INC·Filed 2015·Granted Apr 17, 2018·1 cites·18 claims
- 1464US9699877B2Extreme ultraviolet light generation apparatus including target droplet joining apparatusGIGAPHOTON INC·Filed 2016·Granted Jul 4, 2017·1 cites·9 claims
- 1562US12185449B2EUV light generation apparatus, electronic device manufacturing method, and inspection methodGIGAPHOTON INC·Filed 2022·Granted Dec 31, 2024·0 cites·20 claims
- 1658US2025362620A1Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2025·Application pending·0 cites
- 1757US7474382B2Method for determining focus deviation amount in pattern exposure and pattern exposure methodPANASONIC CORP·Filed 2004·Granted Jan 6, 2009·5 cites·22 claims
- 1855US11659646B2Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted May 23, 2023·0 cites·17 claims
- 1954US5332236ASealing mechanism for a rotary actuatorSUMITOMO PRECISION PROD CO·Filed 1992·Granted Jul 26, 1994·25 cites·12 claims
- 2053US2017053780A1Target supply device, target material refining method, recording medium having target material refining program recorded therein, and target generatorGIGAPHOTON INC·Filed 2016·Application pending·0 cites
- 2152US5593175ALeg apparatus for the magnetically levitated vehicleRAILWAY TECHNICAL RES INST·Filed 1995·Granted Jan 14, 1997·26 cites·4 claims
- 2251US12332575B2Target supply system, extreme ultraviolet light generation apparatus, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2023·Granted Jun 17, 2025·0 cites·18 claims
- 2350US11360391B2Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2020·Granted Jun 14, 2022·0 cites·16 claims
- 2450US10143074B2Filter and target supply apparatusGIGAPHOTON INC·Filed 2014·Granted Nov 27, 2018·0 cites·22 claims
- 2548US7692026B2Pyrrolotriazole compoundFUJIFILM CORP·Filed 2005·Granted Apr 6, 2010·0 cites·1 claims
- 2645US11395398B2Extreme ultraviolet light generation apparatus and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted Jul 19, 2022·0 cites·16 claims
- 2736US2017215266A1Vibrator unit and target supply deviceGIGAPHOTON INC·Filed 2017·Application pending·0 cites
- 2827US5481984ALeg apparatus for the magnetically levitated vehicleRAILWAY TECHNICAL RES INST·Filed 1994·Granted Jan 9, 1996·2 cites·6 claims
- 2922US6184383B1Method of producing acetalsFUJI PHOTO FILM CO LTD·Filed 1999·Granted Feb 6, 2001·0 cites·9 claims
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