Inventor · disambiguated record
Yuta Seya
Also filed as: SEYA YUTA
4 granted patents·1 citations·filing 2013–2017
55Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0156US9177823B2Plasma etching method and plasma etching apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Nov 3, 2015·1 cites·14 claims
- 0239US10707088B2Method of processing target objectTOKYO ELECTRON LTD·Filed 2017·Granted Jul 7, 2020·0 cites·18 claims
- 0339US10692726B2Method for processing workpieceTOKYO ELECTRON LTD·Filed 2017·Granted Jun 23, 2020·0 cites·17 claims
- 0430US9779962B2Plasma etching methodTOKYO ELECTRON LTD·Filed 2015·Granted Oct 3, 2017·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →