Inventor · disambiguated record
Dmytro Chumakov
Also filed as: CHUMAKOV DMYTRO
19 granted patents·1 pending application·48 citations·filing 2006–2014
91Inventor score
Top patents by PatentIndex Score
20 records- 0190US8598579B2Test structure for ILD void testing and contact resistance measurement in a semiconductor deviceCHUMAKOV DMYTRO·Filed 2011·Granted Dec 3, 2013·18 cites·16 claims
- 0282US8236645B1Integrated circuits having place-efficient capacitors and methods for fabricating the sameCHUMAKOV DMYTRO·Filed 2011·Granted Aug 7, 2012·5 cites·17 claims
- 0381US8497583B2Stress reduction in chip packaging by a stress compensation region formed around the chipCHUMAKOV DMYTRO·Filed 2010·Granted Jul 30, 2013·7 cites·13 claims
- 0480US8563426B2Shrinkage of contact elements and vias in a semiconductor device by incorporating additional tapering materialCHUMAKOV DMYTRO·Filed 2011·Granted Oct 22, 2013·8 cites·10 claims
- 0571US8508053B2Chip package including multiple sections for reducing chip package interactionCHUMAKOV DMYTRO·Filed 2010·Granted Aug 13, 2013·3 cites·20 claims
- 0669US8748199B2In-situ measurement of feature dimensionsCHUMAKOV DMYTRO·Filed 2011·Granted Jun 10, 2014·2 cites·15 claims
- 0768US8435885B2Method and system for extracting samples after patterning of microstructure devicesCHUMAKOV DMYTRO·Filed 2011·Granted May 7, 2013·2 cites·21 claims
- 0860US8946019B2Semiconductor device comprising a buried capacitor formed in the contact levelCHUMAKOV DMYTRO·Filed 2010·Granted Feb 3, 2015·2 cites·16 claims
- 0958US8420479B2Semiconductor device comprising a capacitor formed in the contact levelCHUMAKOV DMYTRO·Filed 2010·Granted Apr 16, 2013·1 cites·11 claims
- 1053US8518721B2Dopant marker for precise recess controlCHUMAKOV DMYTRO·Filed 2012·Granted Aug 27, 2013·0 cites·20 claims
- 1152US9006906B2DRAM cell based on conductive nanochannel plateGLOBALFOUNDRIES INC·Filed 2014·Granted Apr 14, 2015·0 cites·20 claims
- 1249US8546915B2Integrated circuits having place-efficient capacitors and methods for fabricating the sameCHUMAKOV DMYTRO·Filed 2012·Granted Oct 1, 2013·0 cites·13 claims
- 1347US8202739B2Dopant marker for precise recess controlCHUMAKOV DMYTRO·Filed 2010·Granted Jun 19, 2012·0 cites·8 claims
- 1446US8785271B2DRAM cell based on conductive nanochannel plateCHUMAKOV DMYTRO·Filed 2011·Granted Jul 22, 2014·0 cites·14 claims
- 1545US7441446B2Method and apparatus for determining surface characteristics by using SPM techniques with acoustic excitation and real-time digitizingADVANCED MICRO DEVICES INC·Filed 2006·Granted Oct 28, 2008·0 cites·20 claims
- 1640US9070639B2Shrinkage of critical dimensions in a semiconductor device by selective growth of a mask materialCHUMAKOV DMYTRO·Filed 2011·Granted Jun 30, 2015·0 cites·25 claims
- 1739US8541311B2Integrated circuit fabrication methods utilizing embedded hardmask layers for high resolution patterningCHUMAKOV DMYTRO·Filed 2010·Granted Sep 24, 2013·0 cites·13 claims
- 1838US8569171B2Mask-based silicidation for FEOL defectivity reduction and yield boostCHUMAKOV DMYTRO·Filed 2011·Granted Oct 29, 2013·0 cites·16 claims
- 1936US2011266685A1Semiconductor Device Comprising Sophisticated Conductive Elements in a Dielectric Material System Formed by Using a Barrier LayerGLOBALFOUNDRIES INC·Filed 2010·Application pending·0 cites
- 2033US8925396B2Method and system for particles analysis in microstructure devices by isolating particlesHETZER PETRA·Filed 2010·Granted Jan 6, 2015·0 cites·22 claims
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