Inventor · disambiguated record
Heinz Felzer
Also filed as: FELZER HEINZ
5 granted patents·1 pending application·17 citations·filing 2009–2019
71Inventor score
Top patents by PatentIndex Score
6 records- 0184US9478420B2Method for depositing a group III nitride semiconductor filmOERLIKON ADVANCED TECH AG·Filed 2014·Granted Oct 25, 2016·12 cites·22 claims
- 0272US11551950B2Substrate processing apparatus and method of processing a substrate and of manufacturing a processed workpieceEVATEC AG·Filed 2018·Granted Jan 10, 2023·2 cites·22 claims
- 0371US8268142B2RF sputtering arrangementWEICHART JUERGEN·Filed 2009·Granted Sep 18, 2012·3 cites·19 claims
- 0447US11952654B2Liquid sputter targetEVATEC AG·Filed 2019·Granted Apr 9, 2024·0 cites·29 claims
- 0535US9607831B2Method for depositing an aluminium nitride layerOERLIKON ADVANCED TECH AG·Filed 2015·Granted Mar 28, 2017·0 cites·19 claims
- 0626US2019252166A1Sputtering sourceEVATEC AG·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →