Inventor · disambiguated record
Tomonori Miwa
Also filed as: MIWA TOMONORI
5 granted patents·39 citations·filing 2004–2019
72Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0185US7658816B2Focus ring and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2004·Granted Feb 9, 2010·36 cites·8 claims
- 0271US9735021B2Etching methodTOKYO ELECTRON LTD·Filed 2016·Granted Aug 15, 2017·2 cites·6 claims
- 0364US9418863B2Method for etching etching target layerTOKYO ELECTRON LTD·Filed 2015·Granted Aug 16, 2016·1 cites·10 claims
- 0446US11264248B2Etching method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Mar 1, 2022·0 cites·17 claims
- 0536US9735025B2Etching methodTOKYO ELECTRON LTD·Filed 2016·Granted Aug 15, 2017·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →