Inventor · disambiguated record
Toshikatsu Wakaki
Also filed as: WAKAKI TOSHIKATSU
3 granted patents·1 pending application·47 citations·filing 2004–2010
70Inventor score
Top patents by PatentIndex Score
4 records- 0185US7658816B2Focus ring and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2004·Granted Feb 9, 2010·36 cites·8 claims
- 0282US8821742B2Plasma etching methodYOSHIDA RYOICHI·Filed 2010·Granted Sep 2, 2014·8 cites·11 claims
- 0371US9337003B2Plasma processing apparatus and constituent part thereofMURAKAMI TAKAHIRO·Filed 2009·Granted May 10, 2016·3 cites·3 claims
- 0444US2006042754A1Plasma etching apparatusTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →