Inventor · disambiguated record
Byung-Seol Ahn
Also filed as: AHN BYUNG-SEOL
5 granted patents·3 pending applications·42 citations·filing 1995–2008
78Inventor score
Top patents by PatentIndex Score
8 records- 0170US7339663B2Method and apparatus for classifying repetitive defects on a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Mar 4, 2008·5 cites·25 claims
- 0257US6043502AApparatus and method for sensing an insertion state of a wafer in a cassetteSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted Mar 28, 2000·26 cites·10 claims
- 0348US7155366B2Apparatus and method for inspecting patterns on wafersSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Dec 26, 2006·3 cites·22 claims
- 0446US2008237461A1Autofocus method in a scanning electron microscopeSAMSUNG ELECTRONICS CO LTD·Filed 2008·Application pending·0 cites
- 0538US2005141761A1Method and apparatus for measuring dimensions of a pattern on a semiconductor deviceFiled 2004·Application pending·0 cites
- 0637US2006013092A1Method and apparatus for aligning a substrate, method and apparatus for inspecting a defect on a substrate using the aligning method and apparatusLEE SUNG-MAN·Filed 2005·Application pending·0 cites
- 0735US5654205AApparatus and method for depositing particles onto a waferSAMSUNG ELECTRONICS CO LTD·Filed 1995·Granted Aug 5, 1997·5 cites·14 claims
- 0832US5746832AApparatus for depositing particles onto a waferSAMSUNG ELECTRONICS CO LTD·Filed 1996·Granted May 5, 1998·3 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →