Inventor · disambiguated record
Song-Moon Suh
Also filed as: SUH SONG-MOON
21 granted patents·8 pending applications·36 citations·filing 2005–2024
92Inventor score
Top patents by PatentIndex Score
29 records- 0192US11815436B2Detection of surface particles on chamber components with carbon dioxideAPPLIED MATERIALS INC·Filed 2022·Granted Nov 14, 2023·2 cites·20 claims
- 0292US9425076B2Substrate transfer robot end effectorAPPLIED MATERIALS INC·Filed 2014·Granted Aug 23, 2016·14 cites·18 claims
- 0389US11555250B2Organic contamination free surface machiningAPPLIED MATERIALS INC·Filed 2021·Granted Jan 17, 2023·2 cites·20 claims
- 0489US11473189B2Method for particle removal from wafers through plasma modification in pulsed PVDAPPLIED MATERIALS INC·Filed 2020·Granted Oct 18, 2022·2 cites·12 claims
- 0585US11441974B2Detection of surface particles on chamber components with carbon dioxideAPPLIED MATERIALS INC·Filed 2019·Granted Sep 13, 2022·2 cites·20 claims
- 0685US2025093238A1Detection of surface particles on chamber components with carbon dioxideAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0783US12169163B2Detection of surface particles on chamber components with carbon dioxideAPPLIED MATERIALS INC·Filed 2023·Granted Dec 17, 2024·0 cites·20 claims
- 0880US12249494B2Remote plasma cleaning of chambers for electronics manufacturing systemsAPPLIED MATERIALS INC·Filed 2023·Granted Mar 11, 2025·0 cites·20 claims
- 0976US11932934B2Method for particle removal from wafers through plasma modification in pulsed PVDAPPLIED MATERIALS INC·Filed 2022·Granted Mar 19, 2024·0 cites·17 claims
- 1076US10431489B2Substrate support apparatus having reduced substrate particle generationAPPLIED MATERIALS INC·Filed 2014·Granted Oct 1, 2019·3 cites·20 claims
- 1176US9252002B2Two piece shutter disk assembly for a substrate process chamberTSAI CHENG-HSIUNG MATTHEW·Filed 2012·Granted Feb 2, 2016·5 cites·19 claims
- 1272US11932950B2Organic contamination free surface machiningAPPLIED MATERIALS INC·Filed 2023·Granted Mar 19, 2024·0 cites·20 claims
- 1371US9925639B2Cleaning of chamber components with solid carbon dioxide particlesAPPLIED MATERIALS INC·Filed 2014·Granted Mar 27, 2018·2 cites·19 claims
- 1471US9147558B2Finned shutter disk for a substrate process chamberAPPLIED MATERIALS INC·Filed 2013·Granted Sep 29, 2015·2 cites·20 claims
- 1568US11854773B2Remote plasma cleaning of chambers for electronics manufacturing systemsAPPLIED MATERIALS INC·Filed 2021·Granted Dec 26, 2023·0 cites·20 claims
- 1662US9269562B2In situ chamber clean with inert hydrogen helium mixture during wafer processAPPLIED MATERIALS INC·Filed 2013·Granted Feb 23, 2016·1 cites·19 claims
- 1762US9177782B2Methods and apparatus for cleaning a substrateAPPLIED MATERIALS INC·Filed 2013·Granted Nov 3, 2015·1 cites·8 claims
- 1861US2021283650A1Methods and Apparatus for Cryogenic Gas Stream Assisted SAM-based Selective DepositionAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 1958US11033930B2Methods and apparatus for cryogenic gas stream assisted SAM-based selective depositionAPPLIED MATERIALS INC·Filed 2019·Granted Jun 15, 2021·0 cites·11 claims
- 2056US2020230782A1Method and Apparatus for cleaning a substrateAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 2153US10217650B2Methods and apparatus for substrate edge cleaningAPPLIED MATERIALS INC·Filed 2016·Granted Feb 26, 2019·0 cites·13 claims
- 2251US9443714B2Methods and apparatus for substrate edge cleaningAPPLIED MATERIALS INC·Filed 2013·Granted Sep 13, 2016·0 cites·18 claims
- 2350US2012237693A1In-situ clean process for metal deposition chambersJACKSON MICHAEL·Filed 2012·Application pending·0 cites
- 2448US2005252454A1Contaminant reducing substrate transport and support systemAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 2546US11508610B2Substrate support with edge sealAPPLIED MATERIALS INC·Filed 2019·Granted Nov 22, 2022·0 cites·18 claims
- 2644US2016322239A1Methods and Apparatus for Cleaning a SubstrateAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 2743US2008105201A1Substrate support components having quartz contact tipsAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 2842US2020105626A1Arcing test vehicle and method of use thereofAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 2939US10755903B2RPS defect reduction by cyclic clean induced RPS coolingAPPLIED MATERIALS INC·Filed 2017·Granted Aug 25, 2020·0 cites·20 claims
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