Inventor · disambiguated record
Leonid Selyutin
Also filed as: SELYUTIN LEONID
15 granted patents·3,565 citations·filing 1996–2000
97Inventor score
Files withAPPLIED MATERIALS INC15
Top patents by PatentIndex Score
15 records- 0199US6099651ATemperature controlled chamber linerAPPLIED MATERIALS INC·Filed 1998·Granted Aug 8, 2000·360 cites·17 claims
- 0299US6035101AHigh temperature multi-layered alloy heater assembly and related methodsAPPLIED MATERIALS INC·Filed 1998·Granted Mar 7, 2000·963 cites·11 claims
- 0398US6258170B1Vaporization and deposition apparatusAPPLIED MATERIALS INC·Filed 1997·Granted Jul 10, 2001·307 cites·47 claims
- 0498US6189482B1High temperature, high flow rate chemical vapor deposition apparatus and related methodsAPPLIED MATERIALS INC·Filed 1997·Granted Feb 20, 2001·447 cites·38 claims
- 0597US6179924B1Heater for use in substrate processing apparatus to deposit tungstenAPPLIED MATERIALS INC·Filed 1998·Granted Jan 30, 2001·324 cites·21 claims
- 0697US6056823ATemperature controlled gas feedthroughAPPLIED MATERIALS INC·Filed 1998·Granted May 2, 2000·167 cites·23 claims
- 0796US5968379AHigh temperature ceramic heater assembly with RF capability and related methodsAPPLIED MATERIALS INC·Filed 1997·Granted Oct 19, 1999·262 cites·35 claims
- 0896US5951776ASelf aligning lift mechanismAPPLIED MATERIALS INC·Filed 1996·Granted Sep 14, 1999·273 cites·34 claims
- 0994US6527865B1Temperature controlled gas feedthroughAPPLIED MATERIALS INC·Filed 2000·Granted Mar 4, 2003·89 cites·61 claims
- 1094US6464795B1Substrate support member for a processing chamberAPPLIED MATERIALS INC·Filed 2000·Granted Oct 15, 2002·98 cites·28 claims
- 1190US5994678AApparatus for ceramic pedestal and metal shaft assemblyAPPLIED MATERIALS INC·Filed 1997·Granted Nov 30, 1999·89 cites·22 claims
- 1289US6120609ASelf-aligning lift mechanismAPPLIED MATERIALS INC·Filed 1997·Granted Sep 19, 2000·104 cites·10 claims
- 1387US6165271ATemperature controlled process and chamber lidAPPLIED MATERIALS INC·Filed 1998·Granted Dec 26, 2000·49 cites·32 claims
- 1474US6063199ATemperature controlled linerAPPLIED MATERIALS INC·Filed 1998·Granted May 16, 2000·23 cites·20 claims
- 1556US6123773AGas manifoldAPPLIED MATERIALS INC·Filed 1998·Granted Sep 26, 2000·10 cites·3 claims
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