Assignee
ZYGO CORP
US·361 granted patents·7 pending applications·11,959 citations·filing 1974–2024
Top patents by PatentIndex Score
368 records- 0199US5398113AMethod and apparatus for surface topography measurement by spatial-frequency analysis of interferogramsZYGO CORP·Filed 1993·Granted Mar 14, 1995·321 cites·33 claims
- 0298US7428057B2Interferometer for determining characteristics of an object surface, including processing and calibrationZYGO CORP·Filed 2006·Granted Sep 23, 2008·75 cites·48 claims
- 0398US7324210B2Scanning interferometry for thin film thickness and surface measurementsZYGO CORP·Filed 2004·Granted Jan 29, 2008·103 cites·35 claims
- 0498US7315382B2Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structuresZYGO CORP·Filed 2006·Granted Jan 1, 2008·62 cites·76 claims
- 0598US6882432B2Frequency transform phase shifting interferometryZYGO CORP·Filed 2001·Granted Apr 19, 2005·179 cites·34 claims
- 0698US6195168B1Infrared scanning interferometry apparatus and methodZYGO CORP·Filed 2000·Granted Feb 27, 2001·180 cites·51 claims
- 0797US7446882B2Interferometer for determining characteristics of an object surfaceZYGO CORP·Filed 2006·Granted Nov 4, 2008·45 cites·25 claims
- 0897US7324214B2Interferometer and method for measuring characteristics of optically unresolved surface featuresZYGO CORP·Filed 2006·Granted Jan 29, 2008·102 cites·56 claims
- 0997US7283248B2Multi-axis interferometers and methods and systems using multi-axis interferometersZYGO CORP·Filed 2005·Granted Oct 16, 2007·44 cites·42 claims
- 1097US7142311B2Methods and systems for determining optical properties using low-coherence interference signalsZYGO CORP·Filed 2005·Granted Nov 28, 2006·33 cites·13 claims
- 1197US7139081B2Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structuresZYGO CORP·Filed 2003·Granted Nov 21, 2006·83 cites·53 claims
- 1297US7106454B2Profiling complex surface structures using scanning interferometryZYGO CORP·Filed 2004·Granted Sep 12, 2006·87 cites·71 claims
- 1397US7012700B2Interferometric optical systems having simultaneously scanned optical path length and focusZYGO CORP·Filed 2003·Granted Mar 14, 2006·138 cites·49 claims
- 1497US6714307B2Measurement of complex surface shapes using a spherical wavefrontZYGO CORP·Filed 2002·Granted Mar 30, 2004·92 cites·89 claims
- 1597US6252668B1Systems and methods for quantifying nonlinearities in interferometry systemsZYGO CORP·Filed 2000·Granted Jun 26, 2001·106 cites·66 claims
- 1697US4606638ADistance measuring interferometer and method of useZYGO CORP·Filed 1983·Granted Aug 19, 1986·110 cites·5 claims
- 1797US4594003AInterferometric wavefront measurementZYGO CORP·Filed 1983·Granted Jun 10, 1986·112 cites·19 claims
- 1896US10591284B2Metrology of multi-layer stacksZYGO CORP·Filed 2019·Granted Mar 17, 2020·14 cites·40 claims
- 1996US7616323B2Interferometer with multiple modes of operation for determining characteristics of an object surfaceZYGO CORP·Filed 2006·Granted Nov 10, 2009·37 cites·67 claims
- 2096US7304747B2Methods and systems for determining optical properties using low-coherence interference signalsZYGO CORP·Filed 2006·Granted Dec 4, 2007·28 cites·20 claims
- 2196US7239398B2Profiling complex surface structures using height scanning interferometryZYGO CORP·Filed 2006·Granted Jul 3, 2007·36 cites·20 claims
- 2296US6847452B2Passive zero shear interferometersZYGO CORP·Filed 2002·Granted Jan 25, 2005·80 cites·80 claims
- 2396US6822745B2Optical systems for measuring form and geometric dimensions of precision engineered partsZYGO CORP·Filed 2001·Granted Nov 23, 2004·97 cites·47 claims
- 2496US6313918B1Single-pass and multi-pass interferometery systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersionZYGO CORP·Filed 1999·Granted Nov 6, 2001·130 cites·94 claims
- 2596US6271923B1Interferometry system having a dynamic beam steering assembly for measuring angle and distanceZYGO CORP·Filed 1999·Granted Aug 7, 2001·174 cites·78 claims
- 2696US6246481B1Systems and methods for quantifying nonlinearities in interferometry systemsZYGO CORP·Filed 2000·Granted Jun 12, 2001·99 cites·27 claims
- 2796US6137574ASystems and methods for characterizing and correcting cyclic errors in distance measuring and dispersion interferometryZYGO CORP·Filed 1999·Granted Oct 24, 2000·148 cites·52 claims
- 2896US5309277AHigh intensity illuminatorZYGO CORP·Filed 1992·Granted May 3, 1994·112 cites·19 claims
- 2995US9746348B2Double pass interferometric encoder systemZYGO CORP·Filed 2015·Granted Aug 29, 2017·8 cites·48 claims
- 3095US7869057B2Multiple-angle multiple-wavelength interferometer using high-NA imaging and spectral analysisZYGO CORP·Filed 2007·Granted Jan 11, 2011·36 cites·25 claims
- 3195US7619746B2Generating model signals for interferometryZYGO CORP·Filed 2007·Granted Nov 17, 2009·36 cites·54 claims
- 3295US7289225B2Surface profiling using an interference pattern matching templateZYGO CORP·Filed 2004·Granted Oct 30, 2007·48 cites·56 claims
- 3395US7277183B2Vibration resistant interferometryZYGO CORP·Filed 2005·Granted Oct 2, 2007·34 cites·21 claims
- 3495US6924898B2Phase-shifting interferometry method and systemZYGO CORP·Filed 2002·Granted Aug 2, 2005·73 cites·65 claims
- 3595US6541759B1Interferometry system having a dynamic beam-steering assembly for measuring angle and distance and employing optical fibers for remote photoelectric detectionZYGO CORP·Filed 2000·Granted Apr 1, 2003·80 cites·43 claims
- 3695US6359692B1Method and system for profiling objects having multiple reflective surfaces using wavelength-tuning phase-shifting interferometryZYGO CORP·Filed 1999·Granted Mar 19, 2002·306 cites·24 claims
- 3795US6249351B1Grazing incidence interferometer and methodZYGO CORP·Filed 1999·Granted Jun 19, 2001·150 cites·88 claims
- 3895US6028670AInterferometric methods and systems using low coherence illuminationZYGO CORP·Filed 1998·Granted Feb 22, 2000·123 cites·19 claims
- 3995US5589938AMethod and apparatus for optical interferometric measurements with reduced sensitivity to vibrationZYGO CORP·Filed 1995·Granted Dec 31, 1996·126 cites·26 claims
- 4095US5402234AMethod and apparatus for the rapid acquisition of data in coherence scanning interferometryZYGO CORP·Filed 1993·Granted Mar 28, 1995·122 cites·35 claims
- 4195US4869593AInterferometric surface profilerZYGO CORP·Filed 1988·Granted Sep 26, 1989·128 cites·80 claims
- 4295US4859066ALinear and angular displacement measuring interferometerZYGO CORP·Filed 1988·Granted Aug 22, 1989·95 cites·74 claims
- 4394US9719777B1Interferometer with real-time fringe-free imagingZYGO CORP·Filed 2015·Granted Aug 1, 2017·12 cites·24 claims
- 4494US7697195B2Apparatus for reducing wavefront errors in output beams of acousto-optic devicesZYGO CORP·Filed 2007·Granted Apr 13, 2010·20 cites·25 claims
- 4594US7684049B2Interferometer and method for measuring characteristics of optically unresolved surface featuresZYGO CORP·Filed 2008·Granted Mar 23, 2010·18 cites·10 claims
- 4694US7068376B2Interferometry method and apparatus for producing lateral metrology imagesZYGO CORP·Filed 2003·Granted Jun 27, 2006·63 cites·38 claims
- 4794US6989905B2Phase gap analysis for scanning interferometryZYGO CORP·Filed 2003·Granted Jan 24, 2006·61 cites·48 claims
- 4894US6888638B1Interferometry system having a dynamic beam steering assembly for measuring angle and distanceZYGO CORP·Filed 2000·Granted May 3, 2005·70 cites·56 claims
- 4994US6757066B2Multiple degree of freedom interferometerZYGO CORP·Filed 2003·Granted Jun 29, 2004·67 cites·73 claims
- 5094US6330065B1Gas insensitive interferometric apparatus and methodsZYGO CORP·Filed 1999·Granted Dec 11, 2001·115 cites·97 claims
Showing the top 50 of 368 patent records by PatentIndex Score.
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