Assignee
ZAO NIKON CO LTD
JP·3 granted patents·16 citations·filing 2006–2007
Top patents by PatentIndex Score
3 records- 0191US7995186B2Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing methodZAO NIKON CO LTD·Filed 2007·Granted Aug 9, 2011·14 cites·17 claims
- 0266US7898645B2Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating methodZAO NIKON CO LTD·Filed 2006·Granted Mar 1, 2011·2 cites·18 claims
- 0345US7515249B2Substrate carrying apparatus, exposure apparatus, and device manufacturing methodZAO NIKON CO LTD·Filed 2006·Granted Apr 7, 2009·0 cites·22 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →