Assignee
YUDOVSKY JOSEPH
US·4 granted patents·22 pending applications·467 citations·filing 2005–2014
Top patents by PatentIndex Score
26 records- 0197US9175394B2Atomic layer deposition chamber with multi injectYUDOVSKY JOSEPH·Filed 2011·Granted Nov 3, 2015·462 cites·18 claims
- 0279US9617640B2Apparatus and methods for injector to substrate gap controlYUDOVSKY JOSEPH·Filed 2014·Granted Apr 11, 2017·4 cites·7 claims
- 0364US8099817B2Wafer edge cleaningYUDOVSKY JOSEPH·Filed 2011·Granted Jan 24, 2012·1 cites·6 claims
- 0462US9631277B2Atomic layer deposition carousel with continuous rotation and methods of useYUDOVSKY JOSEPH·Filed 2011·Granted Apr 25, 2017·0 cites·14 claims
- 0560US2012225194A1Apparatus And Process For Atomic Layer DepositionYUDOVSKY JOSEPH·Filed 2011·Application pending·0 cites
- 0660US2012225193A1Apparatus And Process For Atomic Layer DepositionYUDOVSKY JOSEPH·Filed 2011·Application pending·0 cites
- 0760US2012225219A1Apparatus And Process For Atomic Layer DepositionYUDOVSKY JOSEPH·Filed 2011·Application pending·0 cites
- 0859US2012222620A1Atomic Layer Deposition Carousel with Continuous Rotation and Methods of UseYUDOVSKY JOSEPH·Filed 2011·Application pending·0 cites
- 0959US2012225207A1Apparatus and Process for Atomic Layer DepositionYUDOVSKY JOSEPH·Filed 2011·Application pending·0 cites
- 1059US2012225203A1Apparatus and Process for Atomic Layer DepositionYUDOVSKY JOSEPH·Filed 2011·Application pending·0 cites
- 1159US2012225204A1Apparatus and Process for Atomic Layer DepositionYUDOVSKY JOSEPH·Filed 2011·Application pending·0 cites
- 1259US2012225192A1Apparatus And Process For Atomic Layer DepositionYUDOVSKY JOSEPH·Filed 2011·Application pending·0 cites
- 1358US2012225191A1Apparatus and Process for Atomic Layer DepositionYUDOVSKY JOSEPH·Filed 2011·Application pending·0 cites
- 1456US2015376786A1Apparatus And Methods For Carousel Atomic Layer DepositionYUDOVSKY JOSEPH·Filed 2014·Application pending·0 cites
- 1555US2014127404A1Apparatus For Spatial Atomic Layer Deposition With Recirculation And Methods Of UseYUDOVSKY JOSEPH·Filed 2013·Application pending·0 cites
- 1652US2013192761A1Rotary Substrate Processing SystemYUDOVSKY JOSEPH·Filed 2013·Application pending·0 cites
- 1751US2012269967A1Hot Wire Atomic Layer Deposition Apparatus And Methods Of UseYUDOVSKY JOSEPH·Filed 2012·Application pending·0 cites
- 1849US2013143415A1Multi-Component Film DepositionYUDOVSKY JOSEPH·Filed 2011·Application pending·0 cites
- 1947US2012135609A1Apparatus and Process for Atomic Layer DepositionYUDOVSKY JOSEPH·Filed 2010·Application pending·0 cites
- 2043US2015376790A1Apparatus And Methods For Differential Pressure Chucking Of SubstratesYUDOVSKY JOSEPH·Filed 2014·Application pending·0 cites
- 2142US2013210238A1Multi-Injector Spatial ALD Carousel and Methods of UseYUDOVSKY JOSEPH·Filed 2013·Application pending·0 cites
- 2240US2013196078A1Multi-Chamber Substrate Processing SystemYUDOVSKY JOSEPH·Filed 2013·Application pending·0 cites
- 2338US2012225206A1Apparatus and Process for Atomic Layer DepositionYUDOVSKY JOSEPH·Filed 2011·Application pending·0 cites
- 2438US2007084406A1Reaction chamber with opposing pockets for gas injection and exhaustYUDOVSKY JOSEPH·Filed 2005·Application pending·0 cites
- 2537US2012103425A1Flow Meter With Improved Thermal Stability And Methods Of UseYUDOVSKY JOSEPH·Filed 2011·Application pending·0 cites
- 2637US2006240921A1Methods and apparatus for adjusting belt tension of a scrubberYUDOVSKY JOSEPH·Filed 2005·Application pending·0 cites
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