Assignee

YIN GERALD

CN·2 granted patents·6 citations·filing 2009–2012

Technology mixH01J2 H10P2 C23C1 H01L1

Top patents by PatentIndex Score

2 records

0178US8297225B2Capacitive CVD reactor and methods for plasma CVD processYIN GERALD·Filed 2009·Granted Oct 30, 2012·6 cites·14 claims
0248US9208998B2Multi-station decoupled reactive ion etch chamberYIN GERALD·Filed 2012·Granted Dec 8, 2015·0 cites·20 claims

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