Assignee
YAMAZAKI KATSUHIRO
JP·2 granted patents·2 pending applications·12 citations·filing 2004–2011
Top patents by PatentIndex Score
4 records- 0178US8088296B2Plasma processing device and plasma processing methodYAMAZAKI KATSUHIRO·Filed 2005·Granted Jan 3, 2012·8 cites·9 claims
- 0277US8524102B2Ashing method and ashing deviceYAMAZAKI KATSUHIRO·Filed 2011·Granted Sep 3, 2013·4 cites·8 claims
- 0339US2008132078A1Ashing Method And Ashing ApparatusYAMAZAKI KATSUHIRO·Filed 2004·Application pending·0 cites
- 0435US2012083918A1Sealed container and semiconductor manufacturing apparatusYAMAZAKI KATSUHIRO·Filed 2011·Application pending·0 cites
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