Assignee
YAMADA AKIO
JP·5 granted patents·1 pending application·21 citations·filing 1978–2011
Top patents by PatentIndex Score
6 records- 0176US8075817B2In-line screw type injection molding machine and method of controlling the sameYAMADA AKIO·Filed 2009·Granted Dec 13, 2011·4 cites·4 claims
- 0269US8196067B2Mask for multi-column electron beam exposure, and electron beam exposure apparatus and exposure method using the sameYAMADA AKIO·Filed 2009·Granted Jun 5, 2012·2 cites·13 claims
- 0364US4145159ABit for electric drillsYAMADA AKIO·Filed 1978·Granted Mar 20, 1979·15 cites·6 claims
- 0457US8222619B2Multi-column electron beam exposure apparatus and multi-column electron beam exposure methodYAMADA AKIO·Filed 2009·Granted Jul 17, 2012·0 cites·11 claims
- 0543US8466439B2Electron beam lithography apparatus and electron beam lithography methodYAMADA AKIO·Filed 2011·Granted Jun 18, 2013·0 cites·6 claims
- 0641US2011204224A1Multi-column electron beam lithography apparatus and electron beam trajectory adjustment method for the sameYAMADA AKIO·Filed 2011·Application pending·0 cites
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