Assignee
XTREME TECH GMBH
DE·43 granted patents·4 pending applications·561 citations·filing 2002–2013
Top patents by PatentIndex Score
47 records- 0192US6894298B2Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas dischargeXTREME TECH GMBH·Filed 2002·Granted May 17, 2005·75 cites·36 claims
- 0291US7365350B2Method and arrangement for the suppression of debris in the generation of short-wavelength radiation based on a plasmaXTREME TECH GMBH·Filed 2006·Granted Apr 29, 2008·23 cites·49 claims
- 0387US6882704B2Radiation source for generating extreme ultraviolet radiationXTREME TECH GMBH·Filed 2003·Granted Apr 19, 2005·43 cites·30 claims
- 0485US6894285B2Arrangement for monitoring the energy radiated by an EUV radiation sourceXTREME TECH GMBH·Filed 2003·Granted May 17, 2005·23 cites·13 claims
- 0583US7599470B2Arrangement for generating extreme ultraviolet radiation from a plasma generated by an energy beam with high conversion efficiency and minimum contaminationXTREME TECH GMBH·Filed 2007·Granted Oct 6, 2009·22 cites·22 claims
- 0681US7649187B2Arrangement for the generation of extreme ultraviolet radiation by means of electric discharge at electrodes which can be regeneratedXTREME TECH GMBH·Filed 2007·Granted Jan 19, 2010·7 cites·29 claims
- 0780US7250621B2Method and arrangement for the plasma-based generation of intensive short-wavelength radiationXTREME TECH GMBH·Filed 2005·Granted Jul 31, 2007·17 cites·34 claims
- 0879US7476884B2Device and method for generating extreme ultraviolet (EUV) radiationXTREME TECH GMBH·Filed 2006·Granted Jan 13, 2009·14 cites·32 claims
- 0979US7329014B2Collector mirror for plasma-based, short-wavelength radiation sourcesXTREME TECH GMBH·Filed 2006·Granted Feb 12, 2008·18 cites·25 claims
- 1079US7068367B2Arrangement for the optical detection of a moving target flow for a pulsed energy beam pumped radiationXTREME TECH GMBH·Filed 2003·Granted Jun 27, 2006·28 cites·37 claims
- 1179US6946669B2Arrangement for the generation of EUV radiation with high repetition ratesXTREME TECH GMBH·Filed 2004·Granted Sep 20, 2005·23 cites·16 claims
- 1278US7329876B2Narrow-band transmission filter for EUV radiationXTREME TECH GMBH·Filed 2007·Granted Feb 12, 2008·6 cites·15 claims
- 1378US7161163B2Method and arrangement for the plasma-based generation of soft x-radiationXTREME TECH GMBH·Filed 2005·Granted Jan 9, 2007·14 cites·26 claims
- 1478US6881971B2Arrangement for the suppression of particle emission in the generation of radiation based on hot plasmaXTREME TECH GMBH·Filed 2003·Granted Apr 19, 2005·25 cites·13 claims
- 1577US7750327B2Device for the generation of a gas curtain for plasma-based EUV radiation sourcesXTREME TECH GMBH·Filed 2008·Granted Jul 6, 2010·7 cites·30 claims
- 1677US6995382B2Arrangement for the generation of intensive short-wave radiation based on a plasmaXTREME TECH GMBH·Filed 2004·Granted Feb 7, 2006·22 cites·28 claims
- 1776US7619232B2Method and device for producing extreme ultraviolet radiation or soft X-ray radiationXTREME TECH GMBH·Filed 2003·Granted Nov 17, 2009·20 cites·29 claims
- 1876US7233013B2Radiation source for the generation of short-wavelength radiationXTREME TECH GMBH·Filed 2006·Granted Jun 19, 2007·12 cites·9 claims
- 1976US6770896B2Method for generating extreme ultraviolet radiation based on a radiation-emitting plasmaXTREME TECH GMBH·Filed 2003·Granted Aug 3, 2004·20 cites·20 claims
- 2075US7372057B2Arrangement for providing a reproducible target flow for the energy beam-induced generation of short-wavelength electromagnetic radiationXTREME TECH GMBH·Filed 2005·Granted May 13, 2008·12 cites·25 claims
- 2173US7405413B2Arrangement for providing target material for the generation of short-wavelength electromagnetic radiationXTREME TECH GMBH·Filed 2005·Granted Jul 29, 2008·10 cites·24 claims
- 2271US7368742B2Arrangement and method for metering target material for the generation of short-wavelength electromagnetic radiationXTREME TECH GMBH·Filed 2005·Granted May 6, 2008·10 cites·33 claims
- 2370US7531820B2Arrangement and method for the generation of extreme ultraviolet radiationXTREME TECH GMBH·Filed 2006·Granted May 12, 2009·8 cites·26 claims
- 2469US7414253B2EUV radiation source with high radiation output based on a gas dischargeXTREME TECH GMBH·Filed 2006·Granted Aug 19, 2008·11 cites·20 claims
- 2567US7328885B2Plasma radiation source and device for creating a gas curtain for plasma radiation sourcesXTREME TECH GMBH·Filed 2004·Granted Feb 12, 2008·14 cites·17 claims
- 2667US7079224B2Arrangement for debris reduction in a radiation source based on a plasmaXTREME TECH GMBH·Filed 2004·Granted Jul 18, 2006·9 cites·12 claims
- 2766US7488962B2Arrangement for the generation of intensive short-wavelength radiation based on a gas discharge plasmaXTREME TECH GMBH·Filed 2006·Granted Feb 10, 2009·7 cites·35 claims
- 2866US7122814B2Arrangement for the stabilization of the radiation emission of a plasmaXTREME TECH GMBH·Filed 2004·Granted Oct 17, 2006·11 cites·27 claims
- 2965US7595594B2Arrangement for switching high electric currents by a gas dischargeXTREME TECH GMBH·Filed 2008·Granted Sep 29, 2009·4 cites·26 claims
- 3065US6829261B2Method for the stabilization of the radiation output of a gas discharge-coupled radiation source in pulsed operationXTREME TECH GMBH·Filed 2003·Granted Dec 7, 2004·10 cites·16 claims
- 3164US7218651B2Arrangement for the generation of a pulsed laser beam of high average outputXTREME TECH GMBH·Filed 2005·Granted May 15, 2007·2 cites·16 claims
- 3259US7800086B2Arrangement for radiation generation by means of a gas dischargeXTREME TECH GMBH·Filed 2006·Granted Sep 21, 2010·5 cites·24 claims
- 3359US6865212B2Method for energy control of pulsed driven, gas discharged-coupled beam sourcesXTREME TECH GMBH·Filed 2003·Granted Mar 8, 2005·5 cites·5 claims
- 3458US7274030B2Apparatus for the temporally stable generation of EUV radiation by means of a laser-induced plasmaXTREME TECH GMBH·Filed 2005·Granted Sep 25, 2007·4 cites·25 claims
- 3556US6914920B2Method for energy stabilization of gas discharged pumped in selected impulse following driven beam sourcesXTREME TECH GMBH·Filed 2003·Granted Jul 5, 2005·4 cites·10 claims
- 3652US7477673B2Arrangement for generating extreme ultraviolet radiation based on an electrically operated gas dischargeXTREME TECH GMBH·Filed 2007·Granted Jan 13, 2009·4 cites·19 claims
- 3750US7812542B2Arrangement and method for the generation of extreme ultraviolet radiation by means of an electrically operated gas dischargeXTREME TECH GMBH·Filed 2008·Granted Oct 12, 2010·3 cites·27 claims
- 3849US8008595B2Arrangement for generating extreme ultraviolet radiation by means of an electrically operated gas dischargeXTREME TECH GMBH·Filed 2007·Granted Aug 30, 2011·2 cites·18 claims
- 3949US7755070B2Arrangement for the suppression of unwanted spectral components in a plasma-based EUV radiation sourceXTREME TECH GMBH·Filed 2006·Granted Jul 13, 2010·3 cites·27 claims
- 4049US6855932B2Detector arrangement for energy measurement of pulsed x-ray radiationXTREME TECH GMBH·Filed 2003·Granted Feb 15, 2005·3 cites·14 claims
- 4146US7974321B2Method and arrangement for stabilizing the average emitted radiation output of a pulsed radiation sourceXTREME TECH GMBH·Filed 2007·Granted Jul 5, 2011·0 cites·19 claims
- 4244US2007181834A1Arrangement and method for the generation of euv radiation of high average outputXTREME TECH GMBH·Filed 2007·Application pending·0 cites
- 4343US2010078578A1Method and arrangement for the operation of plasma-based short-wavelength radiation sourcesXTREME TECH GMBH·Filed 2009·Application pending·0 cites
- 4442US7072370B2Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sourcesXTREME TECH GMBH·Filed 2004·Granted Jul 4, 2006·1 cites·28 claims
- 4536US9024527B2Device for generating short-wavelength electromagnetic radiation based on a gas discharge plasmaXTREME TECH GMBH·Filed 2013·Granted May 5, 2015·0 cites·11 claims
- 4634US2006226377A1Plasma radiation sourceXTREME TECH GMBH·Filed 2006·Application pending·0 cites
- 4732US2006215712A1Method and arrangement for the efficient generation of short-wavelength radiation based on a laser-generated plasmaXTREME TECH GMBH·Filed 2006·Application pending·0 cites
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