Assignee
WYKO CORP
US·43 granted patents·2,488 citations·filing 1985–1998
Top patents by PatentIndex Score
43 records- 0197US5133601ARough surface profiler and methodWYKO CORP·Filed 1991·Granted Jul 28, 1992·212 cites·12 claims
- 0295US5602643AMethod and apparatus for correcting surface profiles determined by phase-shifting interferometry according to optical parameters of test surfaceWYKO CORP·Filed 1996·Granted Feb 11, 1997·150 cites·24 claims
- 0395US5471303ACombination of white-light scanning and phase-shifting interferometry for surface profile measurementsWYKO CORP·Filed 1994·Granted Nov 28, 1995·169 cites·15 claims
- 0495US5355221ARough surface profiler and methodWYKO CORP·Filed 1993·Granted Oct 11, 1994·112 cites·10 claims
- 0595US5129724AApparatus and method for simultaneous measurement of film thickness and surface height variation for film-substrate sampleWYKO CORP·Filed 1991·Granted Jul 14, 1992·152 cites·42 claims
- 0694US4639139AOptical profiler using improved phase shifting interferometryWYKO CORP·Filed 1985·Granted Jan 27, 1987·146 cites·24 claims
- 0791US6185315B1Method of combining multiple sets of overlapping surface-profile interferometric data to produce a continuous composite mapWYKO CORP·Filed 1998·Granted Feb 6, 2001·150 cites·10 claims
- 0891US5555471AMethod for measuring thin-film thickness and step height on the surface of thin-film/substrate test samples by phase-shifting interferometryWYKO CORP·Filed 1995·Granted Sep 10, 1996·116 cites·12 claims
- 0990US4984893APhase shifting device and methodWYKO CORP·Filed 1989·Granted Jan 15, 1991·57 cites·17 claims
- 1090US4832489ATwo-wavelength phase-shifting interferometer and methodWYKO CORP·Filed 1986·Granted May 23, 1989·136 cites·26 claims
- 1189US5640270AOrthogonal-scanning microscope objective for vertical-scanning and phase-shifting interferometryWYKO CORP·Filed 1996·Granted Jun 17, 1997·89 cites·27 claims
- 1287US5204734ARough surface profiler and methodWYKO CORP·Filed 1992·Granted Apr 20, 1993·53 cites·11 claims
- 1385US5064286AOptical alignment system utilizing alignment spot produced by image inverterWYKO CORP·Filed 1990·Granted Nov 12, 1991·56 cites·18 claims
- 1484US5173605ACompact temperature-compensated tube-type scanning probe with large scan range and independent x, y, and z controlWYKO CORP·Filed 1992·Granted Dec 22, 1992·49 cites·16 claims
- 1584US5122648AApparatus and method for automatically focusing an interference microscopeWYKO CORP·Filed 1990·Granted Jun 16, 1992·83 cites·10 claims
- 1680US5172002AOptical position sensor for scanning probe microscopesWYKO CORP·Filed 1991·Granted Dec 15, 1992·52 cites·13 claims
- 1779US5483064APositioning mechanism and method for providing coaxial alignment of a probe and a scanning means in scanning tunneling and scanning force microscopyWYKO CORP·Filed 1994·Granted Jan 9, 1996·66 cites·12 claims
- 1879US5196713AOptical position sensor with corner-cube and servo-feedback for scanning microscopesWYKO CORP·Filed 1992·Granted Mar 23, 1993·49 cites·14 claims
- 1977US5446547ACombination of motorized and piezoelectric translation for long-range vertical scanning interferometryWYKO CORP·Filed 1994·Granted Aug 29, 1995·38 cites·36 claims
- 2077US5173746AMethod for rapid, accurate measurement of step heights between dissimilar materialsWYKO CORP·Filed 1991·Granted Dec 22, 1992·40 cites·9 claims
- 2174US5398112AMethod for testing an optical window with a small wedge angleWYKO CORP·Filed 1993·Granted Mar 14, 1995·37 cites·10 claims
- 2271US5633715ACentroid approach for estimating modulation peak in broad-bandwidth interferometryWYKO CORP·Filed 1995·Granted May 27, 1997·38 cites·17 claims
- 2370US5987189AMethod of combining multiple sets of overlapping surface-profile interferometric data to produce a continuous composite mapWYKO CORP·Filed 1996·Granted Nov 16, 1999·49 cites·8 claims
- 2466US5502566AMethod and apparatus for absolute optical measurement of entire surfaces of flatsWYKO CORP·Filed 1995·Granted Mar 26, 1996·35 cites·8 claims
- 2565US5260572AScanning probe microscope including height plus deflection method and apparatus to achieve both high resolution and high speed scanningWYKO CORP·Filed 1992·Granted Nov 9, 1993·25 cites·15 claims
- 2664US4931630AApparatus and method for automatically focusing an interference microscopeWYKO CORP·Filed 1989·Granted Jun 5, 1990·26 cites·23 claims
- 2760US5055695AAlignment system and method for infrared interferometerWYKO CORP·Filed 1990·Granted Oct 8, 1991·20 cites·10 claims
- 2859US4884003ACompact micromotion translatorWYKO CORP·Filed 1988·Granted Nov 28, 1989·16 cites·15 claims
- 2958US5103094ACompact temperature-compensated tube-type scanning probe with large scan rangeWYKO CORP·Filed 1991·Granted Apr 7, 1992·20 cites·20 claims
- 3057US5116115AMethod and apparatus for measuring corneal topographyWYKO CORP·Filed 1990·Granted May 26, 1992·84 cites·18 claims
- 3156US4955719AInterferometer with thin absorbing beam equalizing pellicleWYKO CORP·Filed 1988·Granted Sep 11, 1990·14 cites·14 claims
- 3255US5844675AInterchangeable sample stage with integral reference surface for magnetic-head suspension measuring instrumentWYKO CORP·Filed 1997·Granted Dec 1, 1998·11 cites·16 claims
- 3355US5321497AInterferometric integration technique and apparatus to confine 2π discontinuityWYKO CORP·Filed 1992·Granted Jun 14, 1994·18 cites·26 claims
- 3452US5200617APMN translator and linearization system in scanning probe microscopeWYKO CORP·Filed 1992·Granted Apr 6, 1993·12 cites·5 claims
- 3550US5452088AMultimode-laser interferometric apparatus for eliminating background interference fringes from thin-plate measurementsWYKO CORP·Filed 1994·Granted Sep 19, 1995·14 cites·22 claims
- 3647US5717782AMethod and apparatus for restoring digitized video pictures generated by an optical surface-height profilerWYKO CORP·Filed 1994·Granted Feb 10, 1998·22 cites·7 claims
- 3746US5995215AAutocollimator with gratingWYKO CORP·Filed 1997·Granted Nov 30, 1999·12 cites·18 claims
- 3845US5689337ACoaxial disc-mount for measuring flatness of computer-drive discs by interferometryWYKO CORP·Filed 1996·Granted Nov 18, 1997·14 cites·31 claims
- 3941US5680214AHorizontal-post/vertical-flexure arrangement for supporting large reference optics in phase-shifting scanningWYKO CORP·Filed 1996·Granted Oct 21, 1997·13 cites·33 claims
- 4038US5978086AMethod and apparatus for correcting shifts between a reference focal point and a reference surface as a result of thermal effects in an interferometric optical objectiveWYKO CORP·Filed 1997·Granted Nov 2, 1999·9 cites·22 claims
- 4137US5726754AVariable-speed scanning for interferometric measurementsWYKO CORP·Filed 1996·Granted Mar 10, 1998·8 cites·15 claims
- 4235US5813809APolymeric insert with crush-formed threads for mating with threaded surfaceWYKO CORP·Filed 1997·Granted Sep 29, 1998·8 cites·12 claims
- 4331US5822136AFriction connector for optical flats in interferometersWYKO CORP·Filed 1996·Granted Oct 13, 1998·8 cites·21 claims
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